Abstract

A CCD-based confocal microscope system that is used to measure accurate three-dimensional surface profiles is reported. For a field of view of 500 μm, surface samples spaced at 12 μm on smooth specular test objects are simultaneously resolved in depth to ~1 μm (depending on the surface being observed). A precision of 0.1 μm is obtained for a mirrored surface for a field of view 400 μm wide. Simple scaling and sampling results permit these results to be extended to other apparatus dimensions and range sampling intervals.

© 1994 Optical Society of America

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