Abstract

We introduce a profilometry sensor that combines phase shifting with a Talbot self-image of a sinusoidal grating as the illumination part of the sensor. Contrast of the Talbot diffraction pattern produced with a sinusoidal grating in a diverging beam is theoretically discussed and verified experimentally. The mathematical relationship that is used to convert the phase measured with this sensor to the corresponding relief of an object is derived in the Appendix. A ceramic former used in the production of lenses was profiled with this sensor, and measurement results are presented.

© 1994 Optical Society of America

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