Abstract

An interferometric technique for automated profilometry of diffuse objects has been proposed. It is based on the Fourier-fringe analysis of spatiotemporal specklegrams produced by a wavelength-shift interferometer with a laser diode as a frequency-tunable light source. Unlike conventional moiré techniques the proposed technique permits the objects to have discontinuous height steps and/or surfaces spatially isolated from one another. Experimental results are presented that demonstrate the validity of the principle.

© 1994 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Frequency-multiplex Fourier-transform profilometry: a single-shot three-dimensional shape measurement of objects with large height discontinuities and/or surface isolations

Mitsuo Takeda, Quan Gu, Masaya Kinoshita, Hideaki Takai, and Yosuke Takahashi
Appl. Opt. 36(22) 5347-5354 (1997)

Fourier transform profilometry for the automatic measurement of 3-D object shapes

Mitsuo Takeda and Kazuhiro Mutoh
Appl. Opt. 22(24) 3977-3982 (1983)

Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry

Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, and Takashi Kurokawa
Appl. Opt. 42(7) 1296-1305 (2003)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (31)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription