Abstract

A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication of high-performance micro-optical elements.

© 1994 Optical Society of America

Mass-transport fabrication of off-axis and prismatic gallium phosphide optics

Todd A. Ballen and James R. Leger
Appl. Opt. 38(14) 2979-2985 (1999)

Laser smoothing of binary gratings and multilevel etched structures in fused silica

Krystian L. Wlodarczyk, Enrique Mendez, Howard J. Baker, Roy McBride, and Denis R. Hall
Appl. Opt. 49(11) 1997-2005 (2010)

Fabrication of microlens arrays based on the mass transport effect of SU-8 photoresist using a multiexposure two-beam interference technique

Cheng Yi Wu, Ting Hsuan Chiang, Ngoc Diep Lai, Danh Bich Do, and Chia Chen Hsu
Appl. Opt. 48(13) 2473-2479 (2009)

Off-axis refractive mass-transported gallium-phosphide microlens array for the reduction of distortion in an optical interconnect system

Todd A. Ballen and James R. Leger
Appl. Opt. 39(32) 6028-6033 (2000)

Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

Todd A. Ballen, James R. Leger, Daniel E. Glumac, Lori S. Swanson, and Edward Gage
Opt. Lett. 25(8) 515-517 (2000)