An integrated optical-disk pickup with a diffractive planar micro-optic system is proposed. In this device, the beam follows a zigzag optical path inside a glass substrate that is used as a light guide. To fabricate off-axis diffractive optical elements, we have recently developed an electron-beam writing system with a curve-pattern generator. It is demonstrated that a transmission off-axis objective microlens, a reflection twin-focusing beam splitter, and reflection layers were integrated on a glass substrate, and such a diffractive planar micro-optic system exhibited an excellent focusing performance and operated for focus-error signal detection, as designed.
© 1994 Optical Society of America
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