Abstract

We experimentally found the unexpected phenomena of scattering in laminated polarization splitters (LPS’s) composed of a-Si:H-SiO2 multilayer and studied its mechanism. The scattering phenomena strongly depend on the incident angle and polarization of the incident light. To reduce the scattering loss in LPS’s, a multilayer with flat layer boundaries is fabricated with rf bias sputtering. As a result, the insertion loss of the LPS is reduced to ~ 1 × 10−3 dB/μm, which is acceptable for practical uses.

© 1994 Optical Society of America

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