Abstract

Beam splitters are used to couple the light of high-power Nd:YAG lasers into a fiber bundle. By the fibers the light is delivered to the workstations in the factory. This technique is used to reduce the costs of the light and to simplify the logistics within the fabrication process. Typically, dielectric beam splitters are used. However, they suffer from a polarization-sensitive splitting ratio. Because the polarization content of a high-power Nd:YAG-laser is not constant in time, polarization-independent beam splitters are of concern. The feasibility of diffractive beam splitters is investigated.

© 1994 Optical Society of America

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