A Mueller analysis has been done of IR ellipsometry performed with imperfect optical components. Equations linking experimental and calculated Fourier coefficients have been derived and consistently solved. Correction routines for permittivity measurements are demonstrated and discussed with gold and SrTiO3 as examples. It is shown that such effects as interferometer polarization, detector dichroism, transmission, and phase changes in polarizers can be calculated and effectively removed from the spectra. The problems of calibration and multiple reflections between IR polarizers are discussed, and error propagation in permittivity measurements is analyzed.
© 1994 Optical Society of America
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