Abstract

The normal-incidence reflectance of ion-beam-deposited boron carbide thin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectances greater than 30% between 67 and 121.6 nm. This high reflectance makes ion-beam-deposited boron carbide an attractive coating for EUV applications.

© 1994 Optical Society of America

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References

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  1. W. J. Choyke, W. D. Partlow, E. P. Supertzi, F. J. Venskytis, G. B. Brandt, “Silicon-carbide diffraction grating for the vacuum ultraviolet: feasibility,” Appl. Opt. 16, 2013–2014 (1977).
    [CrossRef] [PubMed]
  2. R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal-incidence reflectance of ion-beam- deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
    [CrossRef] [PubMed]
  3. R. A. M. Keski-Kuha, J. S. Gum, J. F. Osantowski, C. M. Fleetwood, “High-reflectance coatings for space applications in the EUV,” in Multilayer and Grazing-Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover, A. B. Walker, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1742, 384–391 (1992).
    [CrossRef]
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    [CrossRef] [PubMed]
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  6. J. F. Osantowski, “Reflectance and optical constants for Cer-Vit from 250 to 1050 Å,” J. Opt. Soc. Am. 64, 834–838 (1974).
    [CrossRef]

1988 (2)

1977 (1)

1974 (1)

Brandt, G. B.

Choyke, W. J.

Fleetwood, C. M.

R. A. M. Keski-Kuha, J. S. Gum, J. F. Osantowski, C. M. Fleetwood, “High-reflectance coatings for space applications in the EUV,” in Multilayer and Grazing-Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover, A. B. Walker, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1742, 384–391 (1992).
[CrossRef]

Gum, J. S.

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal-incidence reflectance of ion-beam- deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

R. A. M. Keski-Kuha, J. S. Gum, J. F. Osantowski, C. M. Fleetwood, “High-reflectance coatings for space applications in the EUV,” in Multilayer and Grazing-Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover, A. B. Walker, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1742, 384–391 (1992).
[CrossRef]

Herzig, H.

Keski-Kuha, R. A. M.

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal-incidence reflectance of ion-beam- deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

R. A. M. Keski-Kuha, J. S. Gum, J. F. Osantowski, C. M. Fleetwood, “High-reflectance coatings for space applications in the EUV,” in Multilayer and Grazing-Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover, A. B. Walker, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1742, 384–391 (1992).
[CrossRef]

Kortright, J. B.

Osantowski, J. F.

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal-incidence reflectance of ion-beam- deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

J. F. Osantowski, “Reflectance and optical constants for Cer-Vit from 250 to 1050 Å,” J. Opt. Soc. Am. 64, 834–838 (1974).
[CrossRef]

R. A. M. Keski-Kuha, J. S. Gum, J. F. Osantowski, C. M. Fleetwood, “High-reflectance coatings for space applications in the EUV,” in Multilayer and Grazing-Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, R. B. Hoover, A. B. Walker, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1742, 384–391 (1992).
[CrossRef]

Partlow, W. D.

Supertzi, E. P.

Toft, A. R.

Venskytis, F. J.

Windt, D. L.

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Figures (1)

Fig. 1
Fig. 1

Measured normal-incidence reflectance of ion-beam-deposited boron carbide, ●. Themeasured reflectance for polished CVD SiC, ■, and measured reflectance forion-beam-deposited SiC, ◆, are shown for comparison.

Tables (1)

Tables Icon

Table 1 Normal-incidence Reflectance R of Ion-Beam-Deposited Boron Carbide and SiC Thin Films

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