Abstract

We have fabricated platinum/carbon (Pt/C) multilayer reflectors with 2d spacaings between 50 and 200 Å, using an electron-beam evaporator. We investigated the effects of 2d values, the number of layer pairs, substrate temperature, coatings, and the long-term stability on the reflectivity performance by using characteristic x rays and monochromatized synchrotron radiation in the 0.8–8-keV region. In this study we show that Pt/C multilayers with 10–20 layer pairs exhibit high and stable soft-x-ray reflectivity. The interfacial roughness was measured in the range of 5 Å and becomes lower for structures deposited at liquid-nitrogen temperatures. Coating these reflectors with a 100-Å-thick platinum layer increased the grazing angle reflectivity without significantly lowering the Bragg peak reflectivity.

© 1994 Optical Society of America

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