Abstract

We present a Penning discharge as a possible radiometric transfer standard source in the vacuum UV, primarily in the spectral region below 20 nm. Following the concept of Finley et al., we have designed a Penning source using NdFeB permanent magnets. Emphasis was put on simple operation, quick electrode exchangeability, and easy source readjustment. The radiant intensities of the emission lines from different ionization stages of both buffer gas atoms and atoms sputtered from the cathodes have been studied in various discharge conditions. For selected Al and buffer gas emission lines we determined the absolute radiant intensities by a comparison with the calculable spectral radiant power of the Berlin Electron Storage Ring. A comparison with data from our hollow-cathode transfer standard source is given.

© 1994 Optical Society of America

High current hollow cathode as a radiometric transfer standard source for the extreme vacuum ultraviolet

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