Abstract

The far-ultraviolet reflectance of aluminum films prepared and maintained under ultrahigh-vacuum conditions was measured for wavelengths ranging from 82.6 to 120.0 nm. The degradation of the reflectance after exposure to controlled doses of molecular oxygen was also studied. The degradation rate proved to be higher for wavelengths less than 120 nm than previous measurements made at 121.6 nm.

© 1994 Optical Society of America

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