Abstract

The monolithic integration of N-channel metal-oxide-semiconductor (NMOS) driver circuits in silicon thin films onto a lead lanthanum zirconate titanate (PLZT) substrate is reported. Two integration methods are compared. Both methods result in NMOS transistors that exhibit electrical properties that are close to those of transistors fabricated in bulk silicon. The characteristics of PLZT modulators driven by thin-film transistors are also similar to those of bulk PLZT modulators. These techniques promise new spatial light modulators of high complexity and performance that good-quality silicon and bulk PLZT can offer.

© 1994 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Design issues and development of monolithic silicon/lead lanthanum zirconate titanate integration technologies for smart spatial light modulators

A. Ersen, S. Krishnakumar, V. Ozguz, J. Wang, C. Fan, S. Esener, and S. H. Lee
Appl. Opt. 31(20) 3950-3965 (1992)

Two-dimensional spatial light modulators fabricated in Si/PLZT

Tsen-Hwang Lin, A. Ersen, J. H. Wang, S. Dasgupta, S. Esener, and S. H. Lee
Appl. Opt. 29(11) 1595-1603 (1990)

Thin ferroelectric interferometer for spatial light modulations

Feiling Wang, Kewen K. Li, Vladimir Fuflyigin, Hua Jiang, Jing Zhao, Peter Norris, and Dennis Goldstein
Appl. Opt. 37(32) 7490-7495 (1998)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription