Abstract

The development of a computer-controlled spectrophotometer that enables measurement of spectral transmittance, reflectance, and optical loss of thin-film specimens is discussed. We also describe the design and testing procedure of the spectrophotometer, incorporating test sample performance data. In the visible region the overall photometric accuracy is verified to be 0.1% and 0.2% for transmittance and reflectance, respectively. The wavelength scale is accurate to within 0.5 nm with a reproducibility of 0.1 nm.

© 1994 Optical Society of America

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