Abstract

An excimer laser reflector at the wavelength of 308 nm (XeCl) consisting of materials of ZrO2–Y2O3 and SiO2 is prepared. The reflectance reaches ~99.5% and the laser-induced damage threshold is raised to ~8.5 J/cm2. The ZrO2–Y2O3 mixture is proven to be a film material with a high laser damage resistance.

© 1993 Optical Society of America

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