Abstract

An excimer laser reflector at the wavelength of 308 nm (XeCl) consisting of materials of ZrO2–Y2O3 and SiO2 is prepared. The reflectance reaches ~99.5% and the laser-induced damage threshold is raised to ~8.5 J/cm2. The ZrO2–Y2O3 mixture is proven to be a film material with a high laser damage resistance.

© 1993 Optical Society of America

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    [CrossRef]
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    [CrossRef]

1987

N. Iwamoto, Y. Makino, M. Kamai, “Characterization of rf-sputtered zirconia coatings,” Thin Solid Films 153, 233–242 (1987).
[CrossRef]

1986

Y. M. Chen, J. F. Tang, P. F. Gu, “Measurement and analysis of properties of films doped with oxides,” Acta Opt. Sin. 6, 70–75 (1986).

1985

1984

1979

1976

J. C. Manifacier, J. Gasiot, J. D. Fillard, “A simple method for the determination of the optical constants n, k and thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1007 (1976).
[CrossRef]

Arndt, D. P.

Azzam, R. M. A.

Baumeister, P.

Bennett, J. M.

Borgogno, J. P.

Box, G. E. P.

G. E. P. Box, W. G. Hunter, J. S. Hunter, Statistics for Experimenters (Wiley, New York, 1978).

Carniglia, C. K.

Case, W. E.

Chen, Y. M.

Y. M. Chen, J. F. Tang, P. F. Gu, “Measurement and analysis of properties of films doped with oxides,” Acta Opt. Sin. 6, 70–75 (1986).

Dobrowolski, J. A.

Fillard, J. D.

J. C. Manifacier, J. Gasiot, J. D. Fillard, “A simple method for the determination of the optical constants n, k and thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1007 (1976).
[CrossRef]

Gasiot, J.

J. C. Manifacier, J. Gasiot, J. D. Fillard, “A simple method for the determination of the optical constants n, k and thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1007 (1976).
[CrossRef]

Gibson, U. J.

Gu, P. F.

Y. M. Chen, J. F. Tang, P. F. Gu, “Measurement and analysis of properties of films doped with oxides,” Acta Opt. Sin. 6, 70–75 (1986).

P. F. Gu, J. F. Tang, “Excimer laser reflectors,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 533–541 (1989).

Hart, T. T.

Ho, F. C.

Hodgkin, V. A.

Hunter, J. S.

G. E. P. Box, W. G. Hunter, J. S. Hunter, Statistics for Experimenters (Wiley, New York, 1978).

Hunter, W. G.

G. E. P. Box, W. G. Hunter, J. S. Hunter, Statistics for Experimenters (Wiley, New York, 1978).

Iwamoto, N.

N. Iwamoto, Y. Makino, M. Kamai, “Characterization of rf-sputtered zirconia coatings,” Thin Solid Films 153, 233–242 (1987).
[CrossRef]

Kamai, M.

N. Iwamoto, Y. Makino, M. Kamai, “Characterization of rf-sputtered zirconia coatings,” Thin Solid Films 153, 233–242 (1987).
[CrossRef]

Klapp, W. P.

Klinger, R. E.

Lichtenstein, T. L.

Lowdermilk, W. H.

Macleod, H. A.

Makino, Y.

N. Iwamoto, Y. Makino, M. Kamai, “Characterization of rf-sputtered zirconia coatings,” Thin Solid Films 153, 233–242 (1987).
[CrossRef]

Manifacier, J. C.

J. C. Manifacier, J. Gasiot, J. D. Fillard, “A simple method for the determination of the optical constants n, k and thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1007 (1976).
[CrossRef]

Milam, D.

Pelletier, E.

Purvis, M. K.

Quinn, D. M.

Rainer, F.

Smith, D.

Strome, D. H.

Swenson, R.

Tang, J. F.

Y. M. Chen, J. F. Tang, P. F. Gu, “Measurement and analysis of properties of films doped with oxides,” Acta Opt. Sin. 6, 70–75 (1986).

P. F. Gu, J. F. Tang, “Excimer laser reflectors,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 533–541 (1989).

Temple, P. A.

Thonn, T. F.

Acta Opt. Sin.

Y. M. Chen, J. F. Tang, P. F. Gu, “Measurement and analysis of properties of films doped with oxides,” Acta Opt. Sin. 6, 70–75 (1986).

Appl. Opt.

J. Phys. E

J. C. Manifacier, J. Gasiot, J. D. Fillard, “A simple method for the determination of the optical constants n, k and thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1007 (1976).
[CrossRef]

Thin Solid Films

N. Iwamoto, Y. Makino, M. Kamai, “Characterization of rf-sputtered zirconia coatings,” Thin Solid Films 153, 233–242 (1987).
[CrossRef]

Other

P. F. Gu, J. F. Tang, “Excimer laser reflectors,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 533–541 (1989).

G. E. P. Box, W. G. Hunter, J. S. Hunter, Statistics for Experimenters (Wiley, New York, 1978).

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Figures (1)

Fig. 1
Fig. 1

Computer simulation of microstructure of A, the undoped ZrO2 film and B, the doped ZrO2-Y2O3 film.

Tables (6)

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Table 1 Properties of Single-Layer Films at 308 nm

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Table 2 Process Parameters of Factorial Design

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Table 3 Experimental Arrangement

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Table 4 Experimental Factorial Design

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Table 5 Analysis of Experimental Results

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Table 6 Measured Results of Reflectors at 308 nm

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