Abstract

A prototype multimode fiber-based Fabry–Perot interferometric pressure probe utilizing a corrugated diaphragm with built-in temperature compensation, with signal recovery by coherence reading, has been constructed and demonstrated. A separate fiber-optic-based temperature sensor was incorporated into the pressure sensor to permit the pressure measurement to be corrected for the temperature dependence of the pressure probe. A measurement range to resolution of 3.6 × 104 − 1 and an overall measurement accuracy of ±0.15% have been achieved. This system represents a practical approach for industrial use.

© 1993 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Non-destructive residual pressure self-measurement method for the sensing chip of optical Fabry-Perot pressure sensor

Xue Wang, Shuang Wang, Junfeng Jiang, Kun Liu, Xuezhi Zhang, Mengnan Xiao, Hai Xiao, and Tiegen Liu
Opt. Express 25(25) 31937-31947 (2017)

Prototype fiber-optic-based Fizeau medical pressure sensor that uses coherence reading

Y. J. Rao and D. A. Jackson
Opt. Lett. 18(24) 2153-2155 (1993)

Analyzing the temperature sensitivity of Fabry-Perot sensor using multilayer graphene diaphragm

Cheng Li, Qianwen Liu, Xiaobin Peng, and Shangchun Fan
Opt. Express 23(21) 27494-27502 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription