Abstract

Techniques are described for at-wavelength interferometry of multilayer coated optics designed for use in extreme-ultraviolet lithography. Broadly tunable undulator radiation, which covers the spectral region from 45 to 400 Å, is described. The coherent power available at these wavelengths is described, and several types of interferometer that might be suitable at these short wavelengths are also described.

© 1993 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography

Yucong Zhu, Katsumi Sugisaki, Masashi Okada, Katsura Otaki, Zhiqiang Liu, Jun Kawakami, Mikihiko Ishii, Jun Saito, Katsuhiko Murakami, Masanobu Hasegawa, Chidane Ouchi, Seima Kato, Takayuki Hasegawa, Akiyoshi Suzuki, Hideo Yokota, and Masahito Niibe
Appl. Opt. 46(27) 6783-6792 (2007)

Direct index of refraction measurements at extreme-ultraviolet and soft-x-ray wavelengths

Kristine Rosfjord, Chang Chang, Ryan Miyakawa, Holly Barth, and David Attwood
Appl. Opt. 45(8) 1730-1736 (2006)

Direct measurement of index of refraction in the extreme-ultraviolet wavelength region with a novel interferometer

Chang Chang, Erik Anderson, Patrick Naulleau, Eric Gullikson, Kenneth Goldberg, and David Attwood
Opt. Lett. 27(12) 1028-1030 (2002)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription