Automated spatially scanning ellipsometer for retardation measurements of transparent materials

Abstract

A highly sensitive and automated technique has been developed for measuring the birefringence in transparent optical materials. The spatially scanning modulated transmission ellipsometer maps the birefringence of a transparent material by probing it with a polarization-modulated He–Ne laser beam. Computer-controlled voltage biasing of a Pockels cell permits self-calibration and background subtraction of the system retardance. The technique is capable of resolving differential retardances as small as 0.1 nm (λ/6328) through a range of ±λ/2, where λ = 632.8 nm. Samples typically range in size from 50 μm to 10 cm in diameter within the sample plane and as much as 400 mm along the optical axis.

© 1993 Optical Society of America

Simultaneous absolute measurements of principal angle and phase retardation with a new common-path heterodyne interferometer

Yu-Lung Lo, Chun-Hau Lai, Jing-Fung Lin, and Ping-Feng Hsu
Appl. Opt. 43(10) 2013-2022 (2004)

Refractive indices of ir materials: 10.6-μm ellipsometer measurements

M. E. Pedinoff, M. Braunstein, and O. M. Stafsudd
Appl. Opt. 16(11) 2849-2857 (1977)

Scanning ellipsometer by rotating polarizer and analyzer

L. Y. Chen and David W. Lynch
Appl. Opt. 26(24) 5221-5228 (1987)

Multichannel transmission ellipsometer for characterization of anisotropic optical materials

R. A. Yarussi, A. R. Heyd, H. V. Nguyen, and R. W. Collins
J. Opt. Soc. Am. A 11(8) 2320-2330 (1994)

High precision retardation measurement using phase detection of Young’s fringes

Suezou Nakadate
Appl. Opt. 29(2) 242-246 (1990)