Abstract

The performance of a 1-J XeCl excimer laser with a variable reflectivity mirror unstable resonator optical cavity is described. The output beam exhibits a flat profile in the near field and a far-field energy distribution with approximately 63% of the energy contained within an angle of 39 μrad (1/e2 spot size).

© 1993 Optical Society of America

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References

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  1. A. E. Siegman, “Unstable optical resonators,” Appl. Opt. 13, 353–367 (1974).
    [CrossRef] [PubMed]
  2. T. J. McKee, G. T. Boyd, “Performance comparison of positive branch unstable resonator cavities for excimer lasers,” Appl. Opt. 27, 1840–1843 (1988).
    [CrossRef] [PubMed]
  3. V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
    [CrossRef]
  4. A. Luches, V. Nassisi, M. R. Perrone, “Experimental characterization of a self-filtering unstable resonator applied to a short pulse XeCl laser,” Appl. Opt. 28, 2047–2051 (1989).
    [CrossRef] [PubMed]
  5. T. J. McKee, “Optical cavity design for long pulse excimer lasers,” Appl. Opt. 30, 635–644 (1991).
    [CrossRef] [PubMed]
  6. M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
    [CrossRef]
  7. P. E. Dyer, “Unstable resonators,” in The Physics and Technology of Laser Resonators, D. R. Hall, P. E. Jackson, eds. (IOP, Bristol, UK, 1989), pp. 21–39.
  8. A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 23, p. 913.
  9. N. McCarthy, P. Lavigne, “Large-size Gaussian mode in unstable resonators using Gaussian mirrors,” Opt. Lett. 10, 553–555 (1985).
    [CrossRef] [PubMed]
  10. S. De Silvestri, P. LaPorta, V. Magni, O. Svelto, B. Majocchi, “Unstable laser resonators with super-Gaussian mirrors,” Opt. Lett. 13, 201–203 (1988).
    [CrossRef] [PubMed]
  11. A Parent, P. Lavigne, “Variable reflectivity unstable resonators for coherent laser radar emitters,” Appl. Opt. 28, 901–903 (1989).
    [CrossRef] [PubMed]
  12. A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 23, p. 918.
  13. Ref. 7, pp. 34–36.

1991 (2)

T. J. McKee, “Optical cavity design for long pulse excimer lasers,” Appl. Opt. 30, 635–644 (1991).
[CrossRef] [PubMed]

M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
[CrossRef]

1989 (2)

1988 (2)

1987 (1)

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

1985 (1)

1974 (1)

Boffa, V.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Boyd, G. T.

Cali, C.

M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
[CrossRef]

De Silvestri, S.

Di Lazzaro, P.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Dyer, P. E.

P. E. Dyer, “Unstable resonators,” in The Physics and Technology of Laser Resonators, D. R. Hall, P. E. Jackson, eds. (IOP, Bristol, UK, 1989), pp. 21–39.

Gallerano, G. P.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Giordano, G.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Hermsen, T.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

LaPorta, P.

Lavigne, P.

Letardi, T.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Luches, A.

Magni, V.

Majocchi, B.

McCarthy, N.

McKee, T. J.

Mezzola, F.

M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
[CrossRef]

Nassisi, V.

Pace, C.

M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
[CrossRef]

Parent, A

Perrone, M. R.

M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
[CrossRef]

A. Luches, V. Nassisi, M. R. Perrone, “Experimental characterization of a self-filtering unstable resonator applied to a short pulse XeCl laser,” Appl. Opt. 28, 2047–2051 (1989).
[CrossRef] [PubMed]

Siegman, A. E.

A. E. Siegman, “Unstable optical resonators,” Appl. Opt. 13, 353–367 (1974).
[CrossRef] [PubMed]

A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 23, p. 913.

A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 23, p. 918.

Svelto, O.

Zheng, C. E.

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Appl. Opt. (5)

Appl. Phys. Lett. (1)

M. R. Perrone, F. Mezzola, C. Cali, C. Pace, “Super-Gaussian reflectivity unstable resonator for excimer lasers,” Appl. Phys. Lett. 59, 1153–1155 (1991).
[CrossRef]

IEEE J. Quantum Electron. (1)

V. Boffa, P. Di Lazzaro, G. P. Gallerano, G. Giordano, T. Hermsen, T. Letardi, C. E. Zheng, “Self-filtering unstable resonator operation of XeCl excimer laser,” IEEE J. Quantum Electron. QE-23, 1241–1244 (1987).
[CrossRef]

Opt. Lett. (2)

Other (4)

P. E. Dyer, “Unstable resonators,” in The Physics and Technology of Laser Resonators, D. R. Hall, P. E. Jackson, eds. (IOP, Bristol, UK, 1989), pp. 21–39.

A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 23, p. 913.

A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), Chap. 23, p. 918.

Ref. 7, pp. 34–36.

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Figures (3)

Fig. 1
Fig. 1

Near-field beam profile. (a) Horizontal scan averaged over 30 pulses, (b) vertical scan, single pulse (horizontal scale, 5 mm/div).

Fig. 2
Fig. 2

Typical VRM far-field intensity distribution (lines of constant intensity).

Fig. 3
Fig. 3

Typical VRM far-field vertical scan through the peak intensity point (11 pixels = 0.51 mm).

Tables (2)

Tables Icon

Table 1 Long-Pulse Excimer VRM Resonator Design Parameters

Tables Icon

Table 2 Performance Comparison of Various Unstable Resonator Designs for XeCl Excimer Lasers

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