Abstract

The main purpose of this research is to study the anisotropic behavior of dielectric material in thin-film form. First we present a theory based on a 4 × 4 transfer matrix linking tangential components of the electromagnetic field on one interface to the tangential components of the electromagnetic field on the other interface of an anisotropic thin film. A biaxial model is associated with the columnar structure of the layer. The comparison between measurements of the transmission in normal incidence in cross-polarized light and of guided-mode propagation constants with the calculations allows us to study the biaxial behavior of TiO2 films. The excellent consistency between measurements and computations demonstrates the validity of the model based on the columnar structure.

© 1993 Optical Society of America

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    [CrossRef] [PubMed]
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    [CrossRef]
  10. H. A. Macleod, “The microstructure of optical thin films,” in Optical Thin Films, R. I. Seddon, ed., Proc. Soc. Photo-Opt. Instrum. Eng.325, 21–28 (1982).
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    [CrossRef] [PubMed]
  12. E. Pelletier, F. Flory, Y. Hu, “Optical characterization of thin films by guided waves,” Appl. Opt. 28, 2918–2924 (1989).
    [CrossRef] [PubMed]

1990

1989

1979

1977

A. G. Dirks, H. J. Leamy, “Columnar microstructure in vapor deposited thin films,” Thin Solid Films 47, 219–222 (1977).
[CrossRef]

1976

1974

1972

1970

1965

D. O. Smith, “Magneto-optical scattering from multilayer magnetic and dielectric films. I: General theory,” Opt. Acta 12, 13–19 (1965).
[CrossRef]

1948

F. Abelès, “Sur la propagation des ondes électromagnétiques dans les milieux stratifiés,” Ann. Phys. (Paris) 3, 505–520 (1948).

Abelès, F.

F. Abelès, “Sur la propagation des ondes électromagnétiques dans les milieux stratifiés,” Ann. Phys. (Paris) 3, 505–520 (1948).

Berreman, D.

Dirks, A. G.

A. G. Dirks, H. J. Leamy, “Columnar microstructure in vapor deposited thin films,” Thin Solid Films 47, 219–222 (1977).
[CrossRef]

Endelema, D.

Flory, F.

Guenther, K. H.

Henvis, B. W.

Hodgkinson, I.

Horowitz, F.

F. Horowitz, “Structure induced optical anisotropy in thin film,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1983);F. Horowitz, H. A. Macleod, “From birefringence in thin films,” in Los Alamos Conference on Optics '83, R. S. McDowell, S. C. Stotlar, eds., Proc. Soc. Photo-Opt. Instrum. Eng.380, 83–87 (1983).

Hu, Y.

Leamy, H. J.

A. G. Dirks, H. J. Leamy, “Columnar microstructure in vapor deposited thin films,” Thin Solid Films 47, 219–222 (1977).
[CrossRef]

Macleod, H. A.

H. A. Macleod, “The microstructure of optical thin films,” in Optical Thin Films, R. I. Seddon, ed., Proc. Soc. Photo-Opt. Instrum. Eng.325, 21–28 (1982).

Pelletier, E.

Pulker, H. K.

Smith, D. O.

D. O. Smith, “Magneto-optical scattering from multilayer magnetic and dielectric films. I: General theory,” Opt. Acta 12, 13–19 (1965).
[CrossRef]

Teitler, S.

Vassel, M. O.

Yeh, P.

Ann. Phys. (Paris)

F. Abelès, “Sur la propagation des ondes électromagnétiques dans les milieux stratifiés,” Ann. Phys. (Paris) 3, 505–520 (1948).

Appl. Opt.

J. Opt. Soc. Am.

Opt. Acta

D. O. Smith, “Magneto-optical scattering from multilayer magnetic and dielectric films. I: General theory,” Opt. Acta 12, 13–19 (1965).
[CrossRef]

Thin Solid Films

A. G. Dirks, H. J. Leamy, “Columnar microstructure in vapor deposited thin films,” Thin Solid Films 47, 219–222 (1977).
[CrossRef]

Other

H. A. Macleod, “The microstructure of optical thin films,” in Optical Thin Films, R. I. Seddon, ed., Proc. Soc. Photo-Opt. Instrum. Eng.325, 21–28 (1982).

F. Horowitz, “Structure induced optical anisotropy in thin film,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1983);F. Horowitz, H. A. Macleod, “From birefringence in thin films,” in Los Alamos Conference on Optics '83, R. S. McDowell, S. C. Stotlar, eds., Proc. Soc. Photo-Opt. Instrum. Eng.380, 83–87 (1983).

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