Abstract

The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 Å, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.

© 1993 Optical Society of America

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References

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  1. T. W. Barbee, S. Mrowka, M. C. Hettrick, “Molybdenum–silicon multilayer mirrors for the extreme ultraviolet,” Appl. Opt. 24, 883–886 (1985).
    [CrossRef] [PubMed]
  2. K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989).
    [CrossRef]
  3. W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986).
    [CrossRef]
  4. J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
    [CrossRef]
  5. B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

1989 (1)

K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989).
[CrossRef]

1986 (2)

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986).
[CrossRef]

J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

1985 (1)

Barbee, T. W.

Davis, J. C.

B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

Do, K. B.

K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989).
[CrossRef]

Gullikson, E. M.

B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

Henke, B. L.

B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

Hettrick, M. C.

Holloway, K.

K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989).
[CrossRef]

Hunter, W. R.

J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986).
[CrossRef]

Mrowka, S.

Perera, R. C. C.

B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

Rife, J. C.

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986).
[CrossRef]

J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

Sinclair, R.

K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989).
[CrossRef]

Williams, R. T.

J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

Appl. Opt. (1)

J. Appl. Phys. (1)

K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989).
[CrossRef]

Nucl. Instrum. Methods A (1)

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. A (1)

J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

Other (1)

B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

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Figures (2)

Fig. 1
Fig. 1

First measurements (square data symbols) and second measurements (diamonds) performed 20 months later. The upper two data sets are the transmittances of two different Si filters, and the lower two data sets are the reflectances of the Mo/Si multilayer structure at an angle of incidence of 10°. The incident light was 80% p polarized.

Fig. 2
Fig. 2

Measured reflectance of the Mo/Si multilayer structure (square data symbols) and the calculated reflectance (solid curve).

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