Abstract

The thermal stability of Mo–Si multilayers prepared by magnetron sputtering is studied. It is found that degradation of x-ray reflectivity of Mo–Si multilayers under heat loading is connected with the roughening of Mo–Si interfaces and the formation of compounds MoxSiy. To avoid these degradation mechanisms we fabricated and tested MoSi2–Si multilayers under heat loading. The MoSi2–Si multilayer appeared to be much more stable both in period and x-ray reflectivity because of thermodynamic equilibrium of the components MoSi2 and Si at the interface. The working temperature of MoSi2–Si multilayers reaches 1000 K.

© 1993 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength

Miriam Barthelmess and Saša Bajt
Appl. Opt. 50(11) 1610-1619 (2011)

Thermal stability studies of short period Sc/Cr and Sc/B4C/Cr multilayers

Mauro Prasciolu, Adam F. G. Leontowich, Kenneth R. Beyerlein, and Saša Bajt
Appl. Opt. 53(10) 2126-2135 (2014)

High reflectivity multilayer for He-II radiation at 30.4 nm

Jingtao Zhu, Zhanshan Wang, Zhong Zhang, Fengli Wang, Hongchang Wang, Wenjuan Wu, Shumin Zhang, Da Xu, Lingyan Chen, Hongjun Zhou, Tonglin Huo, Mingqi Cui, and Yidong Zhao
Appl. Opt. 47(13) C310-C314 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription