Abstract

A parameter compensation method is developed to improve the linearity of the Michelson interferometric angular measurement. The formulas for the exact calculation of the parameters are presented; different cases are discussed. By introducing a weight function in the calculation, we can change the distribution of the linearity over the whole range of measurement. The theoretical analysis and the experimental results show that this method greatly improves the linearity of the measurement even for a large range of measurement.

© 1993 Optical Society of America

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