Abstract

We use a backdiffracted beam from a grating to establish accurately ellipsometric angles of incidence in configurations where samples cannot be accessed directly.

© 1992 Optical Society of America

Full Article  |  PDF Article
Related Articles
Generation of periodic surface corrugations

L. F. Johnson, G. W. Kammlott, and K. A. Ingersoll
Appl. Opt. 17(8) 1165-1181 (1978)

Ultraviolet–visible ellipsometry for process control during the etching of submicrometer features

N. Blayo, R. A. Cirelli, F. P. Klemens, and J. T. C. Lee
J. Opt. Soc. Am. A 12(3) 591-599 (1995)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (1)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription