The use of optical differential phase-contrast microscopy to obtain the surface profile of samples is outlined. The range of accurate feature height determination was calculated as a function of steepness of the side of the feature. Heights of thin features (height <0.1 μm) were accurately determined experimentally. Sample tilting and oblique stage scanning were required in order to determine the heights of thicker samples. Reconstructed profile heights were measured as a function of defocus.
© 1992 Optical Society of America
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