Abstract

We discuss the realization of highly efficient fan-out elements. Laser-beam writing lithography is available now for fabricating smooth surface relief microstructures. We develop several methods for optimizing microstructure profiles. Only a small number of parameters in the object plane are necessary for determining the kinoform. This simplifies the calculation of M × N arrays also for large M and N. Experimental results for a 9-beam fan-out element are presented.

© 1992 Optical Society of America

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  1. J. N. Mait, “Design of binary-phase and multiphase Fourier gratings for array generation,” J. Opt. Soc. Am. A 7, 1514–1528 (1990).
    [CrossRef]
  2. J. Turunen, J. Fagerholm, A. Vasara, M. R. Taghizadeh, “Detour-phase kinoform interconnects: the concept and fabrication considerations,” J. Opt. Soc. Am. A 7, 1202–1208 (1990).
    [CrossRef]
  3. M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of micro-optical components by laser writing in photoresist,” in Micro-Optics II, A. M. Scheggi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1506, 65–70 (1991).
  4. M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of kinoform structures for optical computing,” Appl. Opt. 31, 5712–5715 (1992).
    [CrossRef] [PubMed]
  5. H. P. Herzig, R. Dändliker, J. M. Teijido, “Beam shaping for high power laser diode arrays by holographic optical elements,” in Holographic Systems, Components and Applications, Conference Publ. 311 (Institution of Electrical Engineers, London, 1989), pp. 133–137.
  6. H. P. Herzig, D. Prongué, R. Dändliker, “Design and fabrication of highly efficient fan-out element,” Jpn. J. Appl. Phys. 27, L1307–L1309 (1990).
    [CrossRef]
  7. W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in Pascal (Cambridge U. Press, Cambridge, 1989)
  8. F. Wyrowski, “Diffractive optical elements: iterative calculation of quantized, blazed phase structures,” J. Opt. Soc. Am. A 7, 961–969 (1990).
    [CrossRef]

1992

1990

Dändliker, R.

H. P. Herzig, D. Prongué, R. Dändliker, “Design and fabrication of highly efficient fan-out element,” Jpn. J. Appl. Phys. 27, L1307–L1309 (1990).
[CrossRef]

H. P. Herzig, R. Dändliker, J. M. Teijido, “Beam shaping for high power laser diode arrays by holographic optical elements,” in Holographic Systems, Components and Applications, Conference Publ. 311 (Institution of Electrical Engineers, London, 1989), pp. 133–137.

Fagerholm, J.

Flannery, B. P.

W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in Pascal (Cambridge U. Press, Cambridge, 1989)

Gale, M. T.

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of kinoform structures for optical computing,” Appl. Opt. 31, 5712–5715 (1992).
[CrossRef] [PubMed]

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of micro-optical components by laser writing in photoresist,” in Micro-Optics II, A. M. Scheggi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1506, 65–70 (1991).

Herzig, H. P.

H. P. Herzig, D. Prongué, R. Dändliker, “Design and fabrication of highly efficient fan-out element,” Jpn. J. Appl. Phys. 27, L1307–L1309 (1990).
[CrossRef]

H. P. Herzig, R. Dändliker, J. M. Teijido, “Beam shaping for high power laser diode arrays by holographic optical elements,” in Holographic Systems, Components and Applications, Conference Publ. 311 (Institution of Electrical Engineers, London, 1989), pp. 133–137.

Lang, G. K.

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of kinoform structures for optical computing,” Appl. Opt. 31, 5712–5715 (1992).
[CrossRef] [PubMed]

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of micro-optical components by laser writing in photoresist,” in Micro-Optics II, A. M. Scheggi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1506, 65–70 (1991).

Mait, J. N.

Press, W. H.

W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in Pascal (Cambridge U. Press, Cambridge, 1989)

Prongué, D.

H. P. Herzig, D. Prongué, R. Dändliker, “Design and fabrication of highly efficient fan-out element,” Jpn. J. Appl. Phys. 27, L1307–L1309 (1990).
[CrossRef]

Raynor, J. M.

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of kinoform structures for optical computing,” Appl. Opt. 31, 5712–5715 (1992).
[CrossRef] [PubMed]

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of micro-optical components by laser writing in photoresist,” in Micro-Optics II, A. M. Scheggi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1506, 65–70 (1991).

Schütz, H.

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of kinoform structures for optical computing,” Appl. Opt. 31, 5712–5715 (1992).
[CrossRef] [PubMed]

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of micro-optical components by laser writing in photoresist,” in Micro-Optics II, A. M. Scheggi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1506, 65–70 (1991).

Taghizadeh, M. R.

Teijido, J. M.

H. P. Herzig, R. Dändliker, J. M. Teijido, “Beam shaping for high power laser diode arrays by holographic optical elements,” in Holographic Systems, Components and Applications, Conference Publ. 311 (Institution of Electrical Engineers, London, 1989), pp. 133–137.

Teukolsky, S. A.

W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in Pascal (Cambridge U. Press, Cambridge, 1989)

Turunen, J.

Vasara, A.

Vetterling, W. T.

W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in Pascal (Cambridge U. Press, Cambridge, 1989)

Wyrowski, F.

Appl. Opt.

J. Opt. Soc. Am. A

Jpn. J. Appl. Phys.

H. P. Herzig, D. Prongué, R. Dändliker, “Design and fabrication of highly efficient fan-out element,” Jpn. J. Appl. Phys. 27, L1307–L1309 (1990).
[CrossRef]

Other

W. H. Press, B. P. Flannery, S. A. Teukolsky, W. T. Vetterling, Numerical Recipes in Pascal (Cambridge U. Press, Cambridge, 1989)

M. T. Gale, G. K. Lang, J. M. Raynor, H. Schütz, “Fabrication of micro-optical components by laser writing in photoresist,” in Micro-Optics II, A. M. Scheggi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1506, 65–70 (1991).

H. P. Herzig, R. Dändliker, J. M. Teijido, “Beam shaping for high power laser diode arrays by holographic optical elements,” in Holographic Systems, Components and Applications, Conference Publ. 311 (Institution of Electrical Engineers, London, 1989), pp. 133–137.

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