Abstract

A scanning probe optical microscope using the Wiener fringe is presented. The Wiener fringe is formed by a standing wave between the incident and reflected waves on an optically reflective surface and is detected by inserting an optical fiber tip into the fringe-field region. The detected signal is used to maintain the tip–sample distance constant so that a topographic image of a sample can be obtained by a computer-assisted instrument. A spatial resolution of 200 nm has been achieved by observing a sample of known geometry.

© 1992 Optical Society of America

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