Abstract
A numerical inversion method of ellipsometry has been developed for determining optical constants and the thickness of uniaxial anisotropic film, of which the optical axis is perpendicular to the film surface. The method of changing film thickness has been proposed to obtain multiple independent ellipsometric equations that can separate the calculation of optical constants and the thickness of the film and reduce the three-parameter problem to a two-parameter problem. A flow chart of the numerical inverse program is given, and an example that applies to Langmuir–Blodgett films is also illustrated.
© 1992 Optical Society of America
Full Article |
PDF Article
More Like This
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Figures (3)
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Tables (1)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Equations (18)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription