Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Integration of SiON waveguides and photodiodes on silicon substrates

Not Accessible

Your library or personal account may give you access

Abstract

Two methods of coupling integrated optical waveguides to photodetectors are investigated. As waveguides, SiON layers were deposited by low-pressure chemical vapor deposition on a thick isolation layer of thermally grown SiO2 on silicon substrates. Lateral p-i-n diode photodetectors were fabricated by standard processing in the silicon substrates. Structures for end-fire and leaky-wave coupling were fabricated. Coupling efficiencies of up to 84% for end-fire and 88% for leaky-wave coupling were obtained. The fabrication steps are described, and the resulting optoelectrical behavior is discussed.

© 1992 Optical Society of America

Full Article  |  PDF Article
More Like This
Low Loss (~6.45dB/cm) Sub-Micron Polycrystalline Silicon Waveguide Integrated with Efficient SiON Waveguide Coupler

Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong
Opt. Express 16(9) 6425-6432 (2008)

Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 1.5-μm wavelength

Franco Bruno, Massimo del Guidice, Roberto Recca, and Francesco Testa
Appl. Opt. 30(31) 4560-4564 (1991)

Low-pressure chemical vapor deposition silicon–oxynitride films for integrated optics

W. Gleine and J. Müller
Appl. Opt. 31(12) 2036-2040 (1992)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved