Abstract

A thin-film spatial light modulator that uses an epitaxial film of Bi12SiO20 has been developed. By using a thin epitaxial film as a sensing, storing, and modulating layer, we can attain high resolution of 27 line pairs/mm at 50% modulation. In addition, a novel device structure that adopts a low resistivity substrate enables this device to be erased quickly only by bias voltage switching.

© 1992 Optical Society of America

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  1. R. E. Aldrich, S. L. Hou, M. L. Harvill, “Electrical and Optical Properties of Bi12SiO20,” J. Appl. Phys. 42, 493–494 (1971).
  2. S. L. Hou, D. S. Oliver, “Pockels readout optical memory using Bi2SiO20,” Appl. Phys. Lett. 18, 325–328 (1971).
  3. B. A. Horwitz, F. J. Corbett, “PROM: theory and applications for the Pockels readout optical modulator,” Opt. Eng. 17, 353–364 (1978).
  4. C. S. Sexton, “Current status of Hughes liquid crystal light valve performance for optical data processing,” in Liquid Crystals and Spatial Light Modulator Materials, W. A. Penn, ed., Proc. Soc. Photo-Opt. Instrum. Eng.684, 96–100 (1986).
  5. G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).
  6. S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.
  7. G. Livescu, D. A. B. Miller, J. E. Henry, A. C. Gossard, J. H. English, “Spatial light modulator and optical dynamic memory using a 6 × 6 array of self-electro-optic-effect devices,” Opt. Lett. 13, 297–299 (1988).
  8. T. Hara, Y. Ooi, Y. Suzuki, M. H. Wu, “Transfer characteristics of the microchannel spatial light modulator,” Appl. Opt. 28, 4781–4786 (1989).
  9. Y. Nagao, Y. Mimura, “Electro-optic thin film spatial light modulator using an expitaxial film of Bi12SiO20,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 214–217.
  10. Y. Nagao, Y. Mimura, “Growth and characterization of Bi12SiO20 films by metalorganic chemical vapor deposition,” IEEE J. Quantum Electron. QE-23, 2152–2158 (1987).
  11. D. S. Oliver, W. R. Buchan, “An optical image storage and processing device using electrooptic ZnS,” IEEE Trans. Electron Devices ED-18, 769–773 (1971).
  12. J. Chen, T. Minemoto, “Numerical analysis of the modulation transfer function of a Pockels readout optical modulator device,” J. Opt. Soc. Am. A 9, 1281–1291 (1989).
  13. A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

1989 (3)

G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).

J. Chen, T. Minemoto, “Numerical analysis of the modulation transfer function of a Pockels readout optical modulator device,” J. Opt. Soc. Am. A 9, 1281–1291 (1989).

T. Hara, Y. Ooi, Y. Suzuki, M. H. Wu, “Transfer characteristics of the microchannel spatial light modulator,” Appl. Opt. 28, 4781–4786 (1989).

1988 (1)

1987 (1)

Y. Nagao, Y. Mimura, “Growth and characterization of Bi12SiO20 films by metalorganic chemical vapor deposition,” IEEE J. Quantum Electron. QE-23, 2152–2158 (1987).

1979 (1)

A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

1978 (1)

B. A. Horwitz, F. J. Corbett, “PROM: theory and applications for the Pockels readout optical modulator,” Opt. Eng. 17, 353–364 (1978).

1971 (3)

D. S. Oliver, W. R. Buchan, “An optical image storage and processing device using electrooptic ZnS,” IEEE Trans. Electron Devices ED-18, 769–773 (1971).

R. E. Aldrich, S. L. Hou, M. L. Harvill, “Electrical and Optical Properties of Bi12SiO20,” J. Appl. Phys. 42, 493–494 (1971).

S. L. Hou, D. S. Oliver, “Pockels readout optical memory using Bi2SiO20,” Appl. Phys. Lett. 18, 325–328 (1971).

Aldrich, R. E.

R. E. Aldrich, S. L. Hou, M. L. Harvill, “Electrical and Optical Properties of Bi12SiO20,” J. Appl. Phys. 42, 493–494 (1971).

Belyaev, V. A.

A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

Buchan, W. R.

D. S. Oliver, W. R. Buchan, “An optical image storage and processing device using electrooptic ZnS,” IEEE Trans. Electron Devices ED-18, 769–773 (1971).

Chen, J.

J. Chen, T. Minemoto, “Numerical analysis of the modulation transfer function of a Pockels readout optical modulator device,” J. Opt. Soc. Am. A 9, 1281–1291 (1989).

Corbett, F. J.

B. A. Horwitz, F. J. Corbett, “PROM: theory and applications for the Pockels readout optical modulator,” Opt. Eng. 17, 353–364 (1978).

Ebihara, T.

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

English, J. H.

Gossard, A. C.

Hara, T.

Harvill, M. L.

R. E. Aldrich, S. L. Hou, M. L. Harvill, “Electrical and Optical Properties of Bi12SiO20,” J. Appl. Phys. 42, 493–494 (1971).

Henry, J. E.

Horwitz, B. A.

B. A. Horwitz, F. J. Corbett, “PROM: theory and applications for the Pockels readout optical modulator,” Opt. Eng. 17, 353–364 (1978).

Hoshi, H.

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

Hou, S. L.

S. L. Hou, D. S. Oliver, “Pockels readout optical memory using Bi2SiO20,” Appl. Phys. Lett. 18, 325–328 (1971).

R. E. Aldrich, S. L. Hou, M. L. Harvill, “Electrical and Optical Properties of Bi12SiO20,” J. Appl. Phys. 42, 493–494 (1971).

Johnson, K. M.

G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).

Kato, N.

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

Leonov, E. I.

A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

Li, W.

G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).

Livescu, G.

Miller, D. A. B.

Mimura, Y.

Y. Nagao, Y. Mimura, “Growth and characterization of Bi12SiO20 films by metalorganic chemical vapor deposition,” IEEE J. Quantum Electron. QE-23, 2152–2158 (1987).

Y. Nagao, Y. Mimura, “Electro-optic thin film spatial light modulator using an expitaxial film of Bi12SiO20,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 214–217.

Minemoto, T.

J. Chen, T. Minemoto, “Numerical analysis of the modulation transfer function of a Pockels readout optical modulator device,” J. Opt. Soc. Am. A 9, 1281–1291 (1989).

Moddel, G.

G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).

Nagao, Y.

Y. Nagao, Y. Mimura, “Growth and characterization of Bi12SiO20 films by metalorganic chemical vapor deposition,” IEEE J. Quantum Electron. QE-23, 2152–2158 (1987).

Y. Nagao, Y. Mimura, “Electro-optic thin film spatial light modulator using an expitaxial film of Bi12SiO20,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 214–217.

Oliver, D. S.

D. S. Oliver, W. R. Buchan, “An optical image storage and processing device using electrooptic ZnS,” IEEE Trans. Electron Devices ED-18, 769–773 (1971).

S. L. Hou, D. S. Oliver, “Pockels readout optical memory using Bi2SiO20,” Appl. Phys. Lett. 18, 325–328 (1971).

Ooi, Y.

Reza, A. A.

A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

Rice, R. A.

G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).

Sekura, R.

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

Senulene, D. B.

A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

Sexton, C. S.

C. S. Sexton, “Current status of Hughes liquid crystal light valve performance for optical data processing,” in Liquid Crystals and Spatial Light Modulator Materials, W. A. Penn, ed., Proc. Soc. Photo-Opt. Instrum. Eng.684, 96–100 (1986).

Suzuki, Y.

Wu, M. H.

Yamamoto, S.

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

Yamanaka, J.

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

Appl. Opt. (1)

Appl. Phys. Lett. (2)

S. L. Hou, D. S. Oliver, “Pockels readout optical memory using Bi2SiO20,” Appl. Phys. Lett. 18, 325–328 (1971).

G. Moddel, K. M. Johnson, W. Li, R. A. Rice, “High-speed binary optically addressed spatial light modulator,” Appl. Phys. Lett. 55, 537–539 (1989).

IEEE J. Quantum Electron. (1)

Y. Nagao, Y. Mimura, “Growth and characterization of Bi12SiO20 films by metalorganic chemical vapor deposition,” IEEE J. Quantum Electron. QE-23, 2152–2158 (1987).

IEEE Trans. Electron Devices (1)

D. S. Oliver, W. R. Buchan, “An optical image storage and processing device using electrooptic ZnS,” IEEE Trans. Electron Devices ED-18, 769–773 (1971).

J. Appl. Phys. (1)

R. E. Aldrich, S. L. Hou, M. L. Harvill, “Electrical and Optical Properties of Bi12SiO20,” J. Appl. Phys. 42, 493–494 (1971).

J. Opt. Soc. Am. A (1)

J. Chen, T. Minemoto, “Numerical analysis of the modulation transfer function of a Pockels readout optical modulator device,” J. Opt. Soc. Am. A 9, 1281–1291 (1989).

Opt. Eng. (1)

B. A. Horwitz, F. J. Corbett, “PROM: theory and applications for the Pockels readout optical modulator,” Opt. Eng. 17, 353–364 (1978).

Opt. Lett. (1)

Sov. Tech. Phys. Lett. (1)

A. A. Reza, D. B. Senulene, V. A. Belyaev, E. I. Leonov, “Optical properties of Bi12SiO20 single crystals,” Sov. Tech. Phys. Lett. 5, 190–191 (1979).

Other (3)

C. S. Sexton, “Current status of Hughes liquid crystal light valve performance for optical data processing,” in Liquid Crystals and Spatial Light Modulator Materials, W. A. Penn, ed., Proc. Soc. Photo-Opt. Instrum. Eng.684, 96–100 (1986).

S. Yamamoto, N. Kato, T. Ebihara, R. Sekura, J. Yamanaka, H. Hoshi, “Operation characteristics of a ferroelectric liquid crystal spatial light modulator,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 105–108.

Y. Nagao, Y. Mimura, “Electro-optic thin film spatial light modulator using an expitaxial film of Bi12SiO20,” in Spatial Light Modulators and Their Applications, Vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 214–217.

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Figures (8)

Fig. 1
Fig. 1

Structure of the Bi12SiO20 TFSLM. The directions of write-in and readout beams are also shown.

Fig. 2
Fig. 2

Ideal charge and potential distribution in the interior of the BSO TFSLM: (a) voltage-controlled erasure in the dark; (b) primed state; (c) write-in mode before exposure; (d) write-in mode under exposure.

Fig. 3
Fig. 3

Schematic of the experimental apparatus for the measurement of device performance.

Fig. 4
Fig. 4

Image of the USAF resolution target read out from BSO TFSLM.

Fig. 5
Fig. 5

MTF of the BSO TFSLM with an epitaxial film thickness of 10 μm.

Fig. 6
Fig. 6

Dependence of transmission on exposure energy for write-in wavelengths of 365 and 380 nm.

Fig. 7
Fig. 7

Sensitivity of the BSO TFSLM for uniform exposure as a function of write-in wavelength. The readout wavelength is 633 nm.

Fig. 8
Fig. 8

Response speed of the voltage-controlled erasure operation. The upper trace shows the change in intensity of the transmitted light, It, through the BSO TFSLM. The lower trace shows the transient of the bias voltage applied to the device.

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