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Bi12SiO20 thin-film spatial light modulator

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Abstract

A thin-film spatial light modulator that uses an epitaxial film of Bi12SiO20 has been developed. By using a thin epitaxial film as a sensing, storing, and modulating layer, we can attain high resolution of 27 line pairs/mm at 50% modulation. In addition, a novel device structure that adopts a low resistivity substrate enables this device to be erased quickly only by bias voltage switching.

© 1992 Optical Society of America

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