Abstract

Infrared, ultraviolet, and mass spectrometers are used to study the evolution of gaseous impurities as a function of time in a discharge-excited KrF laser. The major contaminants detected, listed in order of prominence, are HF, CF₄, COF₂, SiF₄, and CO₂. The effect of each of these individual impurities on the laser performance is measured, and the results are used in a simple model that accurately predicts the decrease in laser output power with time. Techniques for improving the gas lifetime in KrF lasers are also discussed.

© 1992 Optical Society of America

Testing of the durability of single-crystal calcium fluoride with and without antireflection coatings for use with high-power KrF excimer lasers

Doug J. Krajnovich, M. Kulkarni, W. Leung, A. C. Tam, A. Spool, and B. York
Appl. Opt. 31(28) 6062-6075 (1992)

Raman scattering measurements in flames using a tunable KrF laser

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Spatial coherence of KrF excimer lasers

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