Abstract

The relationship between the statistical structure parameters of a rough surface and the associated correlation parameters of a scattered field is used to develop a method for rough-surface diagnostics. The treatment is based on the model of a random phase object with an inhomogeneity phase dispersion σ2<1. The proposed diagnostic methods are applicable to surfaces with a roughness period comparable to the radiation wavelength employed and the surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface-roughness element heights is ~0.003 μm.

© 1992 Optical Society of America

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