Abstract

A technique that allows Mueller matrix components to be measured and involves the use of two phase modulators instead of the usual method that uses four modulators is discussed. It allows true matrix components to be measured instead of the ratio of sums of matrix components, which are measured using a single modulator.

© 1992 Optical Society of America

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References

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  1. S. N. Jasperson, S. E. Schnatterly, “An improved method for high reflectivity ellipsometry based on a polarization modulator technique,” Rev. Sci. Instrum. 40, 761–767 (1969).
    [CrossRef]
  2. A. J. Hunt, D. R. Huffman, A new polarization-modulation light scattering instrument, Rev. Sci. Instrum. 44, 1753–1762 (1973).
    [CrossRef]
  3. S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
    [CrossRef]
  4. M. E. Pedinoff, M. Braunstein, O. M. Stafsudd, “Refractive indices of IR materials: 10.6-μm ellipsometer measurements,” Appl Opt. 16, 2849–2857 (1977).
    [CrossRef] [PubMed]
  5. R. J. Perry, A. J. Hunt, D. R. Huffman, “Experimental determinations of Mueller scattering matrices for nonspherical particles,” Appl. Opt. 17, 2700–2710 (1978).
    [CrossRef] [PubMed]
  6. R. C. Thompson, J. R. Bottiger, E. S. Fry, “Measurement of polarized light interactions via the Mueller matrix,” Appl. Opt. 19, 1323–1332 (1980).
    [CrossRef] [PubMed]
  7. B. W. Bell, W. S. Bickel, “Single fiber light scattering matrix: an experimental determination,” Appl. Opt. 20, 3874–3879 (1981).
    [CrossRef] [PubMed]
  8. A. Moritani, Y. Okuda, J. Nakai, “Use of an ADP four-crystal electrooptic modulator in ellipsometry,” Appl. Opt. 22, 1329–1336 (1983).
    [CrossRef] [PubMed]
  9. V. J. Iafelice, W. S. Bickel, “Polarized light-scattering matrix elements for select perfect and perturbed optical surfaces,” Appl. Opt. 26, 2410–2415 (1987).
    [CrossRef]
  10. G. E. Jellison, F. A. Modine, “Accurate calibration of a photoelastic modulator in polarization modulation ellipsometry,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 231–253 (1989).

1987 (1)

1983 (1)

1981 (1)

1980 (1)

1978 (1)

1977 (1)

M. E. Pedinoff, M. Braunstein, O. M. Stafsudd, “Refractive indices of IR materials: 10.6-μm ellipsometer measurements,” Appl Opt. 16, 2849–2857 (1977).
[CrossRef] [PubMed]

1973 (1)

A. J. Hunt, D. R. Huffman, A new polarization-modulation light scattering instrument, Rev. Sci. Instrum. 44, 1753–1762 (1973).
[CrossRef]

1969 (1)

S. N. Jasperson, S. E. Schnatterly, “An improved method for high reflectivity ellipsometry based on a polarization modulator technique,” Rev. Sci. Instrum. 40, 761–767 (1969).
[CrossRef]

Allen, S. D.

S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
[CrossRef]

Bell, B. W.

Bickel, W. S.

Bottiger, J. R.

Braunstein, A. I.

S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
[CrossRef]

Braunstein, M.

M. E. Pedinoff, M. Braunstein, O. M. Stafsudd, “Refractive indices of IR materials: 10.6-μm ellipsometer measurements,” Appl Opt. 16, 2849–2857 (1977).
[CrossRef] [PubMed]

S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
[CrossRef]

Cheng, J. C.

S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
[CrossRef]

Fry, E. S.

Huffman, D. R.

Hunt, A. J.

Iafelice, V. J.

Jasperson, S. N.

S. N. Jasperson, S. E. Schnatterly, “An improved method for high reflectivity ellipsometry based on a polarization modulator technique,” Rev. Sci. Instrum. 40, 761–767 (1969).
[CrossRef]

Jellison, G. E.

G. E. Jellison, F. A. Modine, “Accurate calibration of a photoelastic modulator in polarization modulation ellipsometry,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 231–253 (1989).

Modine, F. A.

G. E. Jellison, F. A. Modine, “Accurate calibration of a photoelastic modulator in polarization modulation ellipsometry,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 231–253 (1989).

Moritani, A.

Nafie, L. A.

S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
[CrossRef]

Nakai, J.

Okuda, Y.

Pedinoff, M. E.

M. E. Pedinoff, M. Braunstein, O. M. Stafsudd, “Refractive indices of IR materials: 10.6-μm ellipsometer measurements,” Appl Opt. 16, 2849–2857 (1977).
[CrossRef] [PubMed]

Perry, R. J.

Schnatterly, S. E.

S. N. Jasperson, S. E. Schnatterly, “An improved method for high reflectivity ellipsometry based on a polarization modulator technique,” Rev. Sci. Instrum. 40, 761–767 (1969).
[CrossRef]

Stafsudd, O. M.

M. E. Pedinoff, M. Braunstein, O. M. Stafsudd, “Refractive indices of IR materials: 10.6-μm ellipsometer measurements,” Appl Opt. 16, 2849–2857 (1977).
[CrossRef] [PubMed]

Thompson, R. C.

Appl Opt. (1)

M. E. Pedinoff, M. Braunstein, O. M. Stafsudd, “Refractive indices of IR materials: 10.6-μm ellipsometer measurements,” Appl Opt. 16, 2849–2857 (1977).
[CrossRef] [PubMed]

Appl. Opt. (5)

Rev. Sci. Instrum. (1)

S. N. Jasperson, S. E. Schnatterly, “An improved method for high reflectivity ellipsometry based on a polarization modulator technique,” Rev. Sci. Instrum. 40, 761–767 (1969).
[CrossRef]

Sci. Instrum. (1)

A. J. Hunt, D. R. Huffman, A new polarization-modulation light scattering instrument, Rev. Sci. Instrum. 44, 1753–1762 (1973).
[CrossRef]

Other (2)

S. D. Allen, A. I. Braunstein, M. Braunstein, J. C. Cheng, L. A. Nafie, “A 10.6 micron modulated light ellipsometer,” in Optical Properties of Highly Transparent Solids, S. S. Mitra, B. Bendow, eds. (Plenum, New York, 1975), pp. 503–513.
[CrossRef]

G. E. Jellison, F. A. Modine, “Accurate calibration of a photoelastic modulator in polarization modulation ellipsometry,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 231–253 (1989).

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Figures (1)

Fig. 1
Fig. 1

Schematic of the apparatus.

Tables (3)

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Table I Measured Signals for the Four Experiments

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Table II Measured Signals at Various Frequencies

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Table III Fourier Frequencies and Amplitudes of the Signals in Units of KSi/4

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

S 1 = A ( 45 ° ) M ω ( 0 ° ) M s M ω ( 45 ° ) P ( 0 ° ) S i , S 2 = A ( 0 ° ) M ω ( 45 ° ) M s M ω ( 45 ° ) P ( 0 ° ) S i , S 3 = A ( 0 ° ) M ω ( 45 ° ) M s M ω ( 0 ° ) P ( 45 ° ) S i , S 4 = A ( 45 ° ) M ω ( 0 ° ) M s M ω ( 0 ° ) P ( 45 ° ) S i ,
cos θ* = J 0 ( Φ 0 ) 2 J 2 ( Φ 0 ) cos 2 ω* t + , sin θ* = 2 J 1 ( Φ 0 ) cos ω* t 2 J 2 ( Φ 0 ) cos 3 ω* t + ,

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