Abstract

Performance of a Ru/Si multilayer polarizer of the double-crystal monochromator type is evaluated in the soft x-ray region. Its polarization was found to be higher than 99.5% at 89 and 97 eV.

© 1991 Optical Society of America

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References

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  1. J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Wiley, New York, 1967), pp. 296–319.
  2. P. Dhez, “Polarizers and polarimeters in the x-uv range,” Nucl. Instrum. Methods A 261, 66–71 (1987).
    [CrossRef]
  3. H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.
  4. S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
    [CrossRef]

1990

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

1987

P. Dhez, “Polarizers and polarimeters in the x-uv range,” Nucl. Instrum. Methods A 261, 66–71 (1987).
[CrossRef]

Dhez, P.

P. Dhez, “Polarizers and polarimeters in the x-uv range,” Nucl. Instrum. Methods A 261, 66–71 (1987).
[CrossRef]

Inoue, T.

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

Kimura, H.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

Maehara, T.

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

Nakayama, S.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

Namioka, T.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

Samson, J. A. R.

J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Wiley, New York, 1967), pp. 296–319.

Yamamoto, M.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

Yanagihara, M.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

Nucl. Instrum. Methods A

P. Dhez, “Polarizers and polarimeters in the x-uv range,” Nucl. Instrum. Methods A 261, 66–71 (1987).
[CrossRef]

Phys. Scr.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser produced plasma source,” Phys. Scr. 41, 754–757 (1990).
[CrossRef]

Other

J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Wiley, New York, 1967), pp. 296–319.

H. Kimura, T. Inoue, T. Maehara, M. Yamamoto, M. Yanagihara, T. Namioka, “Polarization measurement in the soft x-ray region,” presented at the 15th International Conference of X-Ray and Inner-Shell Processes, Knoxville, Tenn., 1990.

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Figures (2)

Fig. 1
Fig. 1

Schematic of the DMP and the experimental setup for the evaluation of its performance. P1 and P2, multilayer polarizers; A, multilayer analyzer; D, detector for measuring the throughput of the DMP; D′, detector for measuring polarization.

Fig. 2
Fig. 2

Measured throughput of the Ru/Si DMP as a function of the photon energy. The dotted curves are the throughput at the fixed angles of incidence that are indicated in the figure. The calculated polarizations of the DMP are also plotted with the filled triangles.

Tables (1)

Tables Icon

Table I Contrast Factors of SXR Transmitted through the DMP and the Rotating Analyzer

Equations (7)

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I ( ψ ) = ( I max I min ) cos 2 ( δ ψ ) + I min ,
C = ( I max I min ) / ( I max + I min ) ,
I p I s = 1 cos 2 ( χ γ ) cos 2 1 + cos 2 ( χ γ ) cos 2 ,
I max = I s R s r s + I p R p r p ,
I min = I s R s r p + I p R p r s ,
C = ( r s r p r s + r p ) × { R s [ 1 + cos 2 ( χ γ ) cos 2 ] R p [ 1 cos 2 ( χ γ ) cos 2 ] R s [ 1 + cos 2 ( χ γ ) cos 2 ] + R p [ 1 cos 2 ( χ γ ) cos 2 ] } .
C = ( r s r p r s + r p ) [ R s ( 1 + cos 2 χ ) R p ( 1 cos 2 χ ) R s ( 1 + cos 2 χ ) + R p ( 1 cos 2 χ ) ] .

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