Abstract

Good optical-quality SiON layers deposited upon a SiO2 buffer layer placed upon silicon wafers have been obtained by using plasma-enhanced chemical vapor deposition from SiH4, NH3, and N2O. Optical planar waveguides with a thickness of 5 μm and a refractive index of 1.470 have been deposited and investigated in the wavelength region of 1.3–1.6 μm. Three absorption bands at 1.40, 1.48, and 1.54 μm have been detected and interpreted as Si–OH, N–H, and Si–H vibrational modes, respectively. Absorption losses of 3.8 dB/cm at 1.4 μm and 3.2 dB/cm at 1.51 μm have been measured. A mild annealing at ∼800°C completely removes the band at 1.40 μm, whereas strong reduction of absorption at 1.51 μm requires 3 h of annealing at 1100°C. As a result, propagation losses of 0.36 to 0.54 dB/cm have been measured at 1.54-μm wavelength.

© 1991 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription