Abstract

Vanadium dioxide (VO2) undergoes a thermally induced phase transition from a semiconductor to a metal near 68°C. The deposition of VO2 thin films by using a process of activated-reactive evaporation provides high-quality VO2-film material; specifically, the semiconducting phase-extinction coefficient in the infrared is reduced by an order of magnitude without detrimental effect on the corresponding metal phase coefficient. The materials improvement significantly enhances accessible performance limits for optical switching devices, as compared with VO2 thin films deposited by both standard reactive and ion-assisted reactive evaporation.

© 1991 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Reactive evaporation of anomalous blue VO2

Francine C. Case
Appl. Opt. 26(8) 1550-1553 (1987)

Giant nonlinear response of terahertz nanoresonators on VO2 thin film

Jisoo Kyoung, Minah Seo, Hyeongryeol Park, Sukmo Koo, Hyun-sun Kim, Youngmi Park, Bong-Jun Kim, Kwangjun Ahn, Namkyoo Park, Hyun-Tak Kim, and Dai-Sik Kim
Opt. Express 18(16) 16452-16459 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription