Abstract

Transparent and optical-grade TiO2 coatings were prepared by sol-gel spinning and ion-beam sputtering techniques. We investigate process parameters for the fabrication of sol-gel spin-coated TiO2 films exhibiting high optical quality comparable with that of ion-beam-sputtered TiO2 films. X-ray diffraction studies showed the sol-gel-deposited films to be amorphous for heat treatments below 350° C, whereas the ion-beam-sputtered films were slightly crystalline and exhibited the anatase structure. The refractive index and the extinction coefficient were evaluated from transmittance characteristics in the ultraviolet, visible, and near-infrared regions. Transmission spectra and ellipsometric measurements showed that spin-coated films were essentially optically equivalent to those prepared by ion-beam sputter deposition.

© 1991 Optical Society of America

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