Abstract

We demonstrate that resist kinoforms can be used for laser micromachining. A 10-level resist kinoform, manufactured by electron-beam lithography, was shown to have a diffraction efficiency of 68%. Nine diffraction-limited holes were simultaneously drilled in 0.10-mm-thick stainless steel. Marking in a silicon wafer is also demonstrated.

© 1991 Optical Society of America

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References

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  1. L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969).
    [CrossRef]
  2. A. Engel, J. Steffen, G. Herziger, “Laser machining with modulated zone plates,” Appl. Opt. 13, 269–273 (1974).
    [CrossRef] [PubMed]
  3. J. P. Riley, F. N. Birkett, “A reflection kinoform for use with a CO2 laser,” Opt. Acta 24, 999–1009 (1977).
    [CrossRef]
  4. R. W. Gerchberg, W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik 35, 237–246 (1972).
  5. S. Jacobsson, S. Hård, A. Bolle, “Partially illuminated kinoforms: a computer study,” Appl. Opt. 26, 2773–2781 (1987).
    [CrossRef] [PubMed]
  6. H. Andersson, M. Ekberg, S. Hård, S. Jacobsson, M. Larsson, T. Nilsson, “Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluation,” Appl. Opt. 29, 4259–4267 (1990).
    [CrossRef] [PubMed]
  7. M. Ekberg, M. Larsson, S. Hård, B. Nilsson, “Multilevel phase holograms manufactured by electron-beam lithography,” Opt. Lett. 15, 568–569 (1990).
    [CrossRef] [PubMed]
  8. L. Lindgren, L. Lundgren, “Spike-mode oscillations in flashlamp pumped Nd Lasers,” J. Appl. Phys. 61, 57–63 (1987).
    [CrossRef]
  9. S. O. Roos, “Laser drilling with different pulse shapes,” J. Appl. Phys. 51, 5061–5063 (1980).
    [CrossRef]

1990 (2)

1987 (2)

L. Lindgren, L. Lundgren, “Spike-mode oscillations in flashlamp pumped Nd Lasers,” J. Appl. Phys. 61, 57–63 (1987).
[CrossRef]

S. Jacobsson, S. Hård, A. Bolle, “Partially illuminated kinoforms: a computer study,” Appl. Opt. 26, 2773–2781 (1987).
[CrossRef] [PubMed]

1980 (1)

S. O. Roos, “Laser drilling with different pulse shapes,” J. Appl. Phys. 51, 5061–5063 (1980).
[CrossRef]

1977 (1)

J. P. Riley, F. N. Birkett, “A reflection kinoform for use with a CO2 laser,” Opt. Acta 24, 999–1009 (1977).
[CrossRef]

1974 (1)

1972 (1)

R. W. Gerchberg, W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik 35, 237–246 (1972).

1969 (1)

L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969).
[CrossRef]

Andersson, H.

Birkett, F. N.

J. P. Riley, F. N. Birkett, “A reflection kinoform for use with a CO2 laser,” Opt. Acta 24, 999–1009 (1977).
[CrossRef]

Bolle, A.

Ekberg, M.

Engel, A.

Gerchberg, R. W.

R. W. Gerchberg, W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik 35, 237–246 (1972).

Hård, S.

Herziger, G.

Hirsch, P. M.

L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969).
[CrossRef]

Jacobsson, S.

Jordan, J. A.

L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969).
[CrossRef]

Larsson, M.

Lesem, L. B.

L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969).
[CrossRef]

Lindgren, L.

L. Lindgren, L. Lundgren, “Spike-mode oscillations in flashlamp pumped Nd Lasers,” J. Appl. Phys. 61, 57–63 (1987).
[CrossRef]

Lundgren, L.

L. Lindgren, L. Lundgren, “Spike-mode oscillations in flashlamp pumped Nd Lasers,” J. Appl. Phys. 61, 57–63 (1987).
[CrossRef]

Nilsson, B.

Nilsson, T.

Riley, J. P.

J. P. Riley, F. N. Birkett, “A reflection kinoform for use with a CO2 laser,” Opt. Acta 24, 999–1009 (1977).
[CrossRef]

Roos, S. O.

S. O. Roos, “Laser drilling with different pulse shapes,” J. Appl. Phys. 51, 5061–5063 (1980).
[CrossRef]

Saxton, W. O.

R. W. Gerchberg, W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik 35, 237–246 (1972).

Steffen, J.

Appl. Opt. (3)

IBM J. Res. Dev. (1)

L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969).
[CrossRef]

J. Appl. Phys. (2)

L. Lindgren, L. Lundgren, “Spike-mode oscillations in flashlamp pumped Nd Lasers,” J. Appl. Phys. 61, 57–63 (1987).
[CrossRef]

S. O. Roos, “Laser drilling with different pulse shapes,” J. Appl. Phys. 51, 5061–5063 (1980).
[CrossRef]

Opt. Acta (1)

J. P. Riley, F. N. Birkett, “A reflection kinoform for use with a CO2 laser,” Opt. Acta 24, 999–1009 (1977).
[CrossRef]

Opt. Lett. (1)

Optik (1)

R. W. Gerchberg, W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik 35, 237–246 (1972).

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Figures (3)

Fig. 1
Fig. 1

Measured resist depth versus electron dose for SAL-110. Generated relief structure, 10-μm-wide stripes; acceleration voltage, 25 kV; beam current, 5 nA; beam spot width, 0.25 μm; beam step size, 0.15 μm.

Fig. 2
Fig. 2

Nine simultaneously drilled holes in a 0.10-mm-thick stainless steel sheet obtained with a single Nd:YAG laser pulse. The hole pattern was generated by a transmission kinoform. Laser pulse energy, 0.2 J; laser peak power, ∼4 kW.

Fig. 3
Fig. 3

116 spots arranged like a frame simultaneously marked in a silicon wafer obtained with a single Nd:YAG laser pulse. The whole pattern was generated by a transmission kinoform. Laser pulse energy, 0.36 J; laser peak power, ∼0.8 kW.

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