Abstract

A new method is proposed for profile measurements using a right-angle prism. With this method, the distance to an object surface is measured by using triangulation based on a change of the critical angle of total reflection. An object surface is illuminated by a scanning laser beam and the incident angle of the scattered light into the prism is measured using the change in the critical angle. Three-dimensional profiles of objects with rough surfaces can be measured with high accuracy.

© 1991 Optical Society of America

Angle measurement based on the internal-reflection effect and the use of right-angle prisms

P. S. Huang and J. Ni
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Simple technique for the fabrication of a penta prism with high accuracy right angle deviation

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Small-angle measurement by use of a single prism

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Calibration method of the right-angle error of a hollow corner-cube retroreflector based on an independent autocollimator

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Angle measurement based on the internal-reflection effect: a new method

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