Abstract
A novel and simple XUV imaging technique using a laser-produced plasma source is described. A spatial resolution of better than 0.8 μm is demonstrated.
© 1991 Optical Society of America
Full Article | PDF ArticleMore Like This
Malcolm R. Howells and Chris Jacobsen
Appl. Opt. 30(13) 1580-1582 (1991)
Joshua Gur and J. M. Forsyth
Appl. Opt. 17(1) 1-2 (1978)
Tatsuo Harada, Sumio Yamaguchi, Masaaki Itou, Shichirou Mitani, Hideki Maezawa, Akira Mikuni, Wataru Okamoto, and Hitoshi Yamaoka
Appl. Opt. 30(10) 1165-1168 (1991)