Abstract

We have developed a loaded (BiY)3Fe5O12 waveguide for integrated magnetooptic devices. The load layer made of SiO2 was fabricated with a reactive ion etching using CHF3 gas. The waveguiding loss was measured by the streak method and by the cutback method. The measured values were <7 cm−1, and the waveguiding loss caused by the lateral confinement was deduced to <1 cm−1.

© 1991 Optical Society of America

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