Abstract

This paper describes experimental work to improve the lateral resolution of stylus instruments. Our efforts involve (1) use of a fine stylus, (2) low stylus load, (3) high magnification in the lateral direction, and (4) specimens with fine surface structure by which the lateral resolution of stylus instruments could be detected. By using styli with tip widths between 0.05 and 0.15-μm, a stylus load of 0.6–1.2 × 10−6-N (0.06–0.12-mgf), and a piezostage for lateral displacement, we detected 0.05–0.15-μm lateral resolution on the surfaces of different kinds of specimens. To get a high lateral resolution, the most important consideration is a fine stylus with small tip size.

© 1991 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Stylus profiling instrument for measuring statistical properties of smooth optical surfaces

J. M. Bennett and J. H. Dancy
Appl. Opt. 20(10) 1785-1802 (1981)

Scanning force microscope as a tool for studying optical surfaces

Jean M. Bennett, Jay Jahanmir, John C. Podlesny, Tami L. Balter, and Daniel T. Hobbs
Appl. Opt. 34(1) 213-230 (1995)

Recent developments in profiling optical surfaces

Jean M. Bennett, Virgil Elings, and Kevin Kjoller
Appl. Opt. 32(19) 3442-3447 (1993)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (14)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription