Abstract

A new ellipsometric method for the complete unambiguous optical characterization of double layers consisting of two strongly absorbing thin films placed on a nonabsorbing substrate is described in this paper. The method utilizes simultaneous interpretation of ellipsometric parameters measured for light reflected and transmitted by the ambient side and the substrate side of the two samples of the double layer investigated. These samples must have different thicknesses of both strongly absorbing films (at least the thickness of one of the two films). The method was successfully employed for analyzing the double layers formed by gold and chromium films at a wavelength of 632.8 nm.

© 1990 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Combined reflection and transmission thin-film ellipsometry: a unified linear analysis

R. M. A. Azzam, M. Elshazly-Zaghloul, and N. M. Bashara
Appl. Opt. 14(7) 1652-1663 (1975)

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films

Gerald Ndong, Angel Lizana, Enric Garcia-Caurel, Valerie Paret, Géraldine Melizzi, Denis Cattelan, Bernard Pelissier, and Jean-Hervé Tortai
Appl. Opt. 55(12) 3323-3332 (2016)

Validity of Ellipsometry for Determining the Average Thickness of Thin, Discontinuous, Absorbing Films*

H. E. Bennett, D. K. Burge, R. L. Peck, and J. M. Bennett
J. Opt. Soc. Am. 59(6) 675-681 (1969)

More Recommended Articles

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription