Complete unambiguous optical characterization of double layers consisting of two strongly absorbing thin films by combined reflection and transmission ellipsometry

Abstract

A new ellipsometric method for the complete unambiguous optical characterization of double layers consisting of two strongly absorbing thin films placed on a nonabsorbing substrate is described in this paper. The method utilizes simultaneous interpretation of ellipsometric parameters measured for light reflected and transmitted by the ambient side and the substrate side of the two samples of the double layer investigated. These samples must have different thicknesses of both strongly absorbing films (at least the thickness of one of the two films). The method was successfully employed for analyzing the double layers formed by gold and chromium films at a wavelength of 632.8 nm.

© 1990 Optical Society of America

Combined reflection and transmission thin-film ellipsometry: a unified linear analysis

R. M. A. Azzam, M. Elshazly-Zaghloul, and N. M. Bashara
Appl. Opt. 14(7) 1652-1663 (1975)

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films

Gerald Ndong, Angel Lizana, Enric Garcia-Caurel, Valerie Paret, Géraldine Melizzi, Denis Cattelan, Bernard Pelissier, and Jean-Hervé Tortai
Appl. Opt. 55(12) 3323-3332 (2016)

Validity of Ellipsometry for Determining the Average Thickness of Thin, Discontinuous, Absorbing Films*

H. E. Bennett, D. K. Burge, R. L. Peck, and J. M. Bennett
J. Opt. Soc. Am. 59(6) 675-681 (1969)

Thickness measurements on transparent substrates based on reflection ellipsometry. I. Optical effects of high-refractive-index additional layers

Soichi Otsuki, Koji Ohta, Kaoru Tamada, and Shin-ichi Wakida
Appl. Opt. 44(28) 5910-5918 (2005)

Transmission and reflection ellipsometry of thin films and multilayer systems

G. Bader, P. V. Ashrit, and Vo-Van Truong
Appl. Opt. 37(7) 1146-1151 (1998)