Abstract

Sinusoidal phase modulating interferometry is possible with Fizeau interferometers. The sinusoidal phase modulation is easily produced by vibrating the reference plate glass in a Fizeau interferometer. Since we can measure the amplitude and phase of the phase modulation with the interferometer itself, the exact phase modulation is obtained. The usefulness of the sinusoidal phase modulating Fizeau interferometer is made clear through surface profile measurements of 80-mm diam plate glasses and integrated circuit wafers and movement measurements of integrated circuit wafers.

© 1990 Optical Society of America

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References

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  1. T. H. Barnes, “Heterodyne Fizeau Interferometer for Testing Flat Surfaces,” Appl. Opt. 26, 2804–2809 (1987).
    [CrossRef] [PubMed]
  2. O. Sasaki, H. Okazaki, “Sinusoidal Phase Modulating Interferometry for Surface Profile Measurement,” Appl. Opt. 25, 3137–3140 (1986).
    [CrossRef] [PubMed]
  3. O. Sasaki, H. Okazaki, M. Sakai, “Sinusoidal Phase Modulating Interferometer Using Integrating-Bucket Method,” Appl. Opt. 26, 1089–1093 (1987).
    [CrossRef] [PubMed]
  4. O. Sasaki, K. Takahashi, “Sinusoidal Phase Modulating Interferomter Using Optical Fibers for Displacement Measurement,” Appl. Opt. 27, 4139–4142 (1988).
    [CrossRef] [PubMed]

1988 (1)

1987 (2)

1986 (1)

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Figures (8)

Fig. 1
Fig. 1

Sinusoidal phase modulating Fizeau interferometer.

Fig. 2
Fig. 2

Distributions of the amplitude z and the phase θ of the sinusoidal phase modulation on the 80-mm diam region measured.

Fig. 3
Fig. 3

Measured surface profile of a 50-mm diam plate glass.

Fig. 4
Fig. 4

Measured surface profile of a 80-mm diam plate glass.

Fig. 5
Fig. 5

Measured surface profile of a 80-mm diam gallium arsenide IC wafer.

Fig. 6
Fig. 6

Measured surface profile of a 80-mm silicon IC wafer.

Fig. 7
Fig. 7

Measured movement of a point on a IC wafer to which an impulse force was applied.

Fig. 8
Fig. 8

Distribution of the maximum displacement of the IC wafer at t = ~50 ms.

Equations (1)

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N < f p / q f c ,

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