Abstract

A micro-Fresnel lens replication method by inorganic material deposition has been developed. A ZnS micro-Fresnel lens and a completely flat micro-Fresnel lens have been made by this method. The ZnS micro-Fresnel lens stability characteristics are improved for temperature, humidity, and focusing. Furthermore, higher resolution in electron-beam lithography is made possible by lens thickness reduction. The completely flat micro-Fresnel lens is a new device and improves integration performance. This lens can be applied to stacked planar optics devices for use in the construction of 3-D optical circuits.

© 1990 Optical Society of America

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