Abstract

A micro-Fresnel lens replication method by inorganic material deposition has been developed. A ZnS micro-Fresnel lens and a completely flat micro-Fresnel lens have been made by this method. The ZnS micro-Fresnel lens stability characteristics are improved for temperature, humidity, and focusing. Furthermore, higher resolution in electron-beam lithography is made possible by lens thickness reduction. The completely flat micro-Fresnel lens is a new device and improves integration performance. This lens can be applied to stacked planar optics devices for use in the construction of 3-D optical circuits.

© 1990 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. T. Fujita, H. Nishihara, J. Koyama, “Blazed Gratings and Fresnel Lenses Fabricated by Electron-Beam Lithography,” Opt. Lett. 7, 578–580 (1982).
    [CrossRef] [PubMed]
  2. S. Aoyama, S. Ogata, T. Inoue, T. Yamashita, “Laser Diode Source Integrating a High-Diffraction-Efficiency Micro-Fresnel Lens with 0.5 N.A. Fabricated by Electron-Beam Lithography,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1988), paper THM49.
  3. M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
    [CrossRef]
  4. S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
    [CrossRef]
  5. H. Hosokawa, T. Yamashita, “Micro Fresnel Lens Replication by Inorganic Material Deposition,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1989), paper WF 62.
  6. H. Hosokawa, T. Yamashita, “Completely Flat Micro Fresnel Lens,” in Technical Digest, Second Microoptics Conference/Eighth Topical Meeting on Gradient-Index Optical Imaging Systems (Optical Society of America, Washington, DC, 1989), paper F4.
  7. K. Iga, M. Oikawa, S. Misawa, J. Banno, Y. Kokubun, “Stacked Planar Optics: an Application of the Planar Micro Lens,” Appl. Opt. 21, 3456–3460 (1982).
    [CrossRef] [PubMed]

1989 (2)

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

1982 (2)

Aoyama, S.

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

S. Aoyama, S. Ogata, T. Inoue, T. Yamashita, “Laser Diode Source Integrating a High-Diffraction-Efficiency Micro-Fresnel Lens with 0.5 N.A. Fabricated by Electron-Beam Lithography,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1988), paper THM49.

Banno, J.

Fujita, T.

Goto, H.

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

Hosokawa, H.

H. Hosokawa, T. Yamashita, “Completely Flat Micro Fresnel Lens,” in Technical Digest, Second Microoptics Conference/Eighth Topical Meeting on Gradient-Index Optical Imaging Systems (Optical Society of America, Washington, DC, 1989), paper F4.

H. Hosokawa, T. Yamashita, “Micro Fresnel Lens Replication by Inorganic Material Deposition,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1989), paper WF 62.

Iga, K.

Imanaka, K.

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

Inoue, T.

S. Aoyama, S. Ogata, T. Inoue, T. Yamashita, “Laser Diode Source Integrating a High-Diffraction-Efficiency Micro-Fresnel Lens with 0.5 N.A. Fabricated by Electron-Beam Lithography,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1988), paper THM49.

Kokubun, Y.

Koyama, J.

Maeda, T.

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

Misawa, S.

Nishihara, H.

Ogata, S.

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

S. Aoyama, S. Ogata, T. Inoue, T. Yamashita, “Laser Diode Source Integrating a High-Diffraction-Efficiency Micro-Fresnel Lens with 0.5 N.A. Fabricated by Electron-Beam Lithography,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1988), paper THM49.

Oikawa, M.

Sekii, H.

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

Tanigami, M.

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

Yamashita, T.

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

H. Hosokawa, T. Yamashita, “Completely Flat Micro Fresnel Lens,” in Technical Digest, Second Microoptics Conference/Eighth Topical Meeting on Gradient-Index Optical Imaging Systems (Optical Society of America, Washington, DC, 1989), paper F4.

S. Aoyama, S. Ogata, T. Inoue, T. Yamashita, “Laser Diode Source Integrating a High-Diffraction-Efficiency Micro-Fresnel Lens with 0.5 N.A. Fabricated by Electron-Beam Lithography,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1988), paper THM49.

H. Hosokawa, T. Yamashita, “Micro Fresnel Lens Replication by Inorganic Material Deposition,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1989), paper WF 62.

Appl. Opt. (1)

IEEE Photon. Technol. Lett. (2)

M. Tanigami, S. Ogata, S. Aoyama, T. Yamashita, K. Imanaka, “Low-Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,” IEEE Photon. Technol. Lett. PTL-1, 384 (1989).
[CrossRef]

S. Ogata, H. Sekii, T. Maeda, H. Goto, T. Yamashita, K. Imanaka, “Micro Collimated Laser Diode with Low Wavefront Aberration,” IEEE Photon. Technol. Lett. PTL-1, 354 (1989).
[CrossRef]

Opt. Lett. (1)

Other (3)

S. Aoyama, S. Ogata, T. Inoue, T. Yamashita, “Laser Diode Source Integrating a High-Diffraction-Efficiency Micro-Fresnel Lens with 0.5 N.A. Fabricated by Electron-Beam Lithography,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1988), paper THM49.

H. Hosokawa, T. Yamashita, “Micro Fresnel Lens Replication by Inorganic Material Deposition,” in Technical Digest, Conference on Lasers and Electro-Optics (Optical Society of America, Washington, DC, 1989), paper WF 62.

H. Hosokawa, T. Yamashita, “Completely Flat Micro Fresnel Lens,” in Technical Digest, Second Microoptics Conference/Eighth Topical Meeting on Gradient-Index Optical Imaging Systems (Optical Society of America, Washington, DC, 1989), paper F4.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (12)

Fig. 1
Fig. 1

Conventional micro-Fresnel lens replication process by photopolymerization.

Fig. 2
Fig. 2

Cross-sectional SEM photograph of a micro-Fresnel lens fabricated by EB lithography.

Fig. 3
Fig. 3

Schematic diagram of the microcollimated laser diode.

Fig. 4
Fig. 4

Novel micro-Fresnel lens replication process by inorganic material deposition.

Fig. 5
Fig. 5

Photomicrographs of the ZnS replicated lens.

Fig. 6
Fig. 6

Cross-sectional SEM photographs of the ZnS replicated lens.

Fig. 7
Fig. 7

Experiment arrangement for measuring focusing characteristics.

Fig. 8
Fig. 8

Focusing characteristics of the ZnS replicated lens.

Fig. 9
Fig. 9

Schematic diagram of the completely flat micro-Fresnel lens.

Fig. 10
Fig. 10

Fabrication process of the completely flat micro-Fresnel lens.

Fig. 11
Fig. 11

Focusing characteristics of the completely flat micro-Fresnel lens.

Fig. 12
Fig. 12

1 × N star coupler as an application of the completely flat micro-Fresnel lens.

Metrics