Abstract

An almost aberration-free focusing grating coupler with a grating area of 1 × 1 mm2 and a 2-mm focal length was made by using an electron beam writing system with accurately calibrated electron beam deflection and an accurate parameter setting of the effective refractive index of the waveguide. The smallest focused spot size achieved was 1.2 μm (FWHM), which is 1.06 times the value of the diffraction-limited spot size.

© 1990 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
    [CrossRef]
  2. D. Heitmann, C. Ortiz, “Calculation and Experimental Verification of Two-Dimensional Focusing Grating Couplers,” IEEE J. Quantum Electron. QE-17, 1257–1263 (1981).
    [CrossRef]
  3. T. Suhara, H. Nishihara, J. Koyama, “High Performance Focusing Grating Coupler Fabricated by Electron-Beam Writing,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, DC, 1984), paper THD4.
  4. Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.
  5. T. Suhara, H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron. QE-22, 845–867 (1986).
    [CrossRef]
  6. S. Ura, T. Suhara, H. Nishihara, “Aberration Characterizations of a Focusing Grating Coupler in an Integrated-Optic Disk Pickup Device,” Appl. Opt. 26, 4777–4782 (1987).
    [CrossRef] [PubMed]

1987

1986

T. Suhara, H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron. QE-22, 845–867 (1986).
[CrossRef]

S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
[CrossRef]

1981

D. Heitmann, C. Ortiz, “Calculation and Experimental Verification of Two-Dimensional Focusing Grating Couplers,” IEEE J. Quantum Electron. QE-17, 1257–1263 (1981).
[CrossRef]

Heitmann, D.

D. Heitmann, C. Ortiz, “Calculation and Experimental Verification of Two-Dimensional Focusing Grating Couplers,” IEEE J. Quantum Electron. QE-17, 1257–1263 (1981).
[CrossRef]

Hori, Y.

Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.

Koyama, J.

S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
[CrossRef]

T. Suhara, H. Nishihara, J. Koyama, “High Performance Focusing Grating Coupler Fabricated by Electron-Beam Writing,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, DC, 1984), paper THD4.

Nishihara, H.

S. Ura, T. Suhara, H. Nishihara, “Aberration Characterizations of a Focusing Grating Coupler in an Integrated-Optic Disk Pickup Device,” Appl. Opt. 26, 4777–4782 (1987).
[CrossRef] [PubMed]

T. Suhara, H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron. QE-22, 845–867 (1986).
[CrossRef]

S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
[CrossRef]

T. Suhara, H. Nishihara, J. Koyama, “High Performance Focusing Grating Coupler Fabricated by Electron-Beam Writing,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, DC, 1984), paper THD4.

Ortiz, C.

D. Heitmann, C. Ortiz, “Calculation and Experimental Verification of Two-Dimensional Focusing Grating Couplers,” IEEE J. Quantum Electron. QE-17, 1257–1263 (1981).
[CrossRef]

Serizawa, H.

Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.

Sogawa, F.

Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.

Suhara, T.

S. Ura, T. Suhara, H. Nishihara, “Aberration Characterizations of a Focusing Grating Coupler in an Integrated-Optic Disk Pickup Device,” Appl. Opt. 26, 4777–4782 (1987).
[CrossRef] [PubMed]

T. Suhara, H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron. QE-22, 845–867 (1986).
[CrossRef]

S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
[CrossRef]

T. Suhara, H. Nishihara, J. Koyama, “High Performance Focusing Grating Coupler Fabricated by Electron-Beam Writing,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, DC, 1984), paper THD4.

Ura, S.

S. Ura, T. Suhara, H. Nishihara, “Aberration Characterizations of a Focusing Grating Coupler in an Integrated-Optic Disk Pickup Device,” Appl. Opt. 26, 4777–4782 (1987).
[CrossRef] [PubMed]

S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
[CrossRef]

Yamamoto, H.

Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.

Appl. Opt.

IEEE J. Quantum Electron.

D. Heitmann, C. Ortiz, “Calculation and Experimental Verification of Two-Dimensional Focusing Grating Couplers,” IEEE J. Quantum Electron. QE-17, 1257–1263 (1981).
[CrossRef]

T. Suhara, H. Nishihara, “Integrated Optics Components and Devices Using Periodic Structures,” IEEE J. Quantum Electron. QE-22, 845–867 (1986).
[CrossRef]

IEEE/OSA J. Lightwave Technol.

S. Ura, T. Suhara, H. Nishihara, J. Koyama, “An Integrated-Optic Disk Pickup Device,” IEEE/OSA J. Lightwave Technol. LT-4, 913–918 (1986).
[CrossRef]

Other

T. Suhara, H. Nishihara, J. Koyama, “High Performance Focusing Grating Coupler Fabricated by Electron-Beam Writing,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, DC, 1984), paper THD4.

Y. Hori, F. Sogawa, H. Yamamoto, H. Serizawa, “Properties of Focusing Grating Coupler Fabricated by Electron Beam Lithography,” in Technical Digest, Topical Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Houston, TX, 1989), paper MEE3.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

Schematic diagram of the EB writing system.

Fig. 2
Fig. 2

Measurement method for grating pitches.

Fig. 3
Fig. 3

Measurement method for the effective refractive index of the waveguide.

Fig. 4
Fig. 4

Experimental setup for measuring focusing properties.

Fig. 5
Fig. 5

Photograph of the focused spot.

Fig. 6
Fig. 6

Focusing profile of the FGC.

Tables (1)

Tables Icon

Table I Spot Sizes of the FGCs (FWHM, f is the Focal Length, Ly Is the Aperture Length of the Beam Propagation Direction, and θ is the Angle of Radiation)

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

Λ a = λ / 2 sin θ b ,
K = Λ s / Λ a .
N eff = sin θ c + λ / Λ 0 ,

Metrics