Abstract

A new technique to obtain the refractive index and thickness of a thin film simultaneously is presented. The of p-polarized light and s-polarized light are measured at various angles of incidence, and by a reflectances numerical procedure the film index and thickness are extracted from the measured reflectances. The and numerical procedure are simple, and the values obtained are accurate. As an example, we measurements made measurements on a single layer film (SiO2/Si) and a double layer film (SiON/SiO2/Si) and confirmed that the values obtained were consistent.

© 1990 Optical Society of America

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