Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances

Not Accessible

Your library or personal account may give you access

Abstract

A new technique to obtain the refractive index and thickness of a thin film simultaneously is presented. The of p-polarized light and s-polarized light are measured at various angles of incidence, and by a reflectances numerical procedure the film index and thickness are extracted from the measured reflectances. The and numerical procedure are simple, and the values obtained are accurate. As an example, we measurements made measurements on a single layer film (SiO2/Si) and a double layer film (SiON/SiO2/Si) and confirmed that the values obtained were consistent.

© 1990 Optical Society of America

Full Article  |  PDF Article
More Like This
Simultaneous measurement of the refractive index and thickness of thin films by S-polarized reflectances

Tami Kihara and Kiyoshi Yokomori
Appl. Opt. 31(22) 4482-4487 (1992)

Measurement of the thickness and refractive index of a thin film by analyzing reflected interference fringes

Deok Woo Kim, Minjae Kwon, Soobong Park, Byoung Joo Kim, and Myoungsik Cha
Appl. Opt. 62(30) 8018-8024 (2023)

Ellipsometry measurement of the complex refractive index and thickness of polysilicon thin films

Jau Hwang Ho, Chung Len Lee, Tan Fu Lei, and Tien Sheng Chao
J. Opt. Soc. Am. A 7(2) 196-205 (1990)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (28)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved