Abstract

With respect to the investigation of low pressure filament-assisted chemical vapor deposition processes for diamond formation, absolute concentrations of atomic hydrogen were determined by two-photon laser-induced fluorescence in the vicinity a heated filament in an environment containing H2 or mixtures of H2 and CH4. Radial H concentration profiles were obtained for different pressures and filament temperatures, diameters, and materials. The influence of the addition of various amounts of methane on the H atom concentrations was examined.

© 1990 Optical Society of America

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