Abstract

Performance of multilayer coated diffraction gratings has been evaluated in the extreme UV. The application of multilayer coatings to two blazed gratings has produced a significant enhancement in grating efficiency in the 300-Å spectral region in first order.

© 1990 Optical Society of America

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References

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  1. E. Spiller, “Reflective Multilayer Coatings for the Far UV Region,” Appl. Opt. 15, 2333 (1976).
    [CrossRef] [PubMed]
  2. J. H. Underwood, T. W. Barbee, “Layered Synthetic Microstructures as Bragg Diffractors for X Rays and Extreme Ultraviolet: Theory and Predicted Performance,” Appl. Opt. 20, 3027 (1981).
    [CrossRef] [PubMed]
  3. R. A. M. Keski-Kuha, “Layered Synthetic Microstructure Technology Considerations for the Extreme Ultraviolet,” Appl. Opt. 23, 3534 (1984).
    [CrossRef] [PubMed]
  4. T. W. Barbee, S. Mrowka, M. C. Hettrick, “Molybdenum-Silicon Multilayer Mirrors for Extreme Ultraviolet,” Appl. Opt. 24, 883 (1985).
    [CrossRef] [PubMed]
  5. J. F. Meekins, R. G. Cruddace, H. Gursky, “Optimization of Layered Synthetic Microstructures for Narrowband Reflectivity at Soft X-Ray and EUV Wavelengths,” Appl. Opt. 25, 2757 (1986).
    [CrossRef]
  6. J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).
  7. B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).
  8. R. C. Catura, L. Golub, “XUV Multilayered Optics for Astrophysics,” Rev. Phys. Appl. 23, 1741–1746 (1988).
    [CrossRef]
  9. A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
    [CrossRef]
  10. L. Golub et al., “Sub-arcsecond Observations of the Solar X-ray Corona,” Nature London 344, 842–844 (1990).
    [CrossRef]
  11. J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-Coated Blazed Grating Performance in the Soft X-Ray Region,” Appl. Opt. 28, 2984–2986 (1989).
    [CrossRef] [PubMed]
  12. T. W. Barbee, “Combined Microstructure X-Ray Optics,” Rev. Sci. Instrum. 260, 1588 (1989).
    [CrossRef]
  13. J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
    [CrossRef]
  14. R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
    [CrossRef]
  15. J. V. Bixler, T. W. Barbee, D. D. Dietrich, “Performance of Multilayer Coated Gratings in the Extreme Ultraviolet,” Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 648–654 (1989).
  16. W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
    [CrossRef]
  17. A. P. Bradford, G. Hass, J. F. Osantowski, A. R. Toft, “Preparation of Mirror Coatings for the Vacuum Ultraviolet in the 2-m Evaporator,” Appl. Opt. 8, 1183 (1969).
    [CrossRef] [PubMed]
  18. J. F. Osantowski, “Reflectance and Optical Constants for Cer-Vit from 250 to 1050 Å,” J. Opt. Soc. Am. 64, 834 (1974).
    [CrossRef]
  19. B. E. Patchett et al., “CDS—The Coronal Diagnostic Spectrometer,” The SOHO Mission—Scientific and Technical Aspects of the Instruments, ESA SP-1104 (1989), pp. 39–42.

1990 (3)

J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
[CrossRef]

R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
[CrossRef]

L. Golub et al., “Sub-arcsecond Observations of the Solar X-ray Corona,” Nature London 344, 842–844 (1990).
[CrossRef]

1989 (5)

J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-Coated Blazed Grating Performance in the Soft X-Ray Region,” Appl. Opt. 28, 2984–2986 (1989).
[CrossRef] [PubMed]

T. W. Barbee, “Combined Microstructure X-Ray Optics,” Rev. Sci. Instrum. 260, 1588 (1989).
[CrossRef]

B. E. Patchett et al., “CDS—The Coronal Diagnostic Spectrometer,” The SOHO Mission—Scientific and Technical Aspects of the Instruments, ESA SP-1104 (1989), pp. 39–42.

J. V. Bixler, T. W. Barbee, D. D. Dietrich, “Performance of Multilayer Coated Gratings in the Extreme Ultraviolet,” Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 648–654 (1989).

A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
[CrossRef]

1988 (3)

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

R. C. Catura, L. Golub, “XUV Multilayered Optics for Astrophysics,” Rev. Phys. Appl. 23, 1741–1746 (1988).
[CrossRef]

1986 (1)

1985 (1)

1984 (1)

1981 (2)

J. H. Underwood, T. W. Barbee, “Layered Synthetic Microstructures as Bragg Diffractors for X Rays and Extreme Ultraviolet: Theory and Predicted Performance,” Appl. Opt. 20, 3027 (1981).
[CrossRef] [PubMed]

W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
[CrossRef]

1976 (1)

1974 (1)

1969 (1)

Barbee, T. W.

J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
[CrossRef]

R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
[CrossRef]

J. V. Bixler, T. W. Barbee, D. D. Dietrich, “Performance of Multilayer Coated Gratings in the Extreme Ultraviolet,” Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 648–654 (1989).

T. W. Barbee, “Combined Microstructure X-Ray Optics,” Rev. Sci. Instrum. 260, 1588 (1989).
[CrossRef]

J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-Coated Blazed Grating Performance in the Soft X-Ray Region,” Appl. Opt. 28, 2984–2986 (1989).
[CrossRef] [PubMed]

A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
[CrossRef]

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

T. W. Barbee, S. Mrowka, M. C. Hettrick, “Molybdenum-Silicon Multilayer Mirrors for Extreme Ultraviolet,” Appl. Opt. 24, 883 (1985).
[CrossRef] [PubMed]

J. H. Underwood, T. W. Barbee, “Layered Synthetic Microstructures as Bragg Diffractors for X Rays and Extreme Ultraviolet: Theory and Predicted Performance,” Appl. Opt. 20, 3027 (1981).
[CrossRef] [PubMed]

Bixler, J. V.

J. V. Bixler, T. W. Barbee, D. D. Dietrich, “Performance of Multilayer Coated Gratings in the Extreme Ultraviolet,” Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 648–654 (1989).

Bradford, A. P.

Brookover, W. J.

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

Catura, R. C.

R. C. Catura, L. Golub, “XUV Multilayered Optics for Astrophysics,” Rev. Phys. Appl. 23, 1741–1746 (1988).
[CrossRef]

Cruddace, R. G.

J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
[CrossRef]

R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
[CrossRef]

J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-Coated Blazed Grating Performance in the Soft X-Ray Region,” Appl. Opt. 28, 2984–2986 (1989).
[CrossRef] [PubMed]

J. F. Meekins, R. G. Cruddace, H. Gursky, “Optimization of Layered Synthetic Microstructures for Narrowband Reflectivity at Soft X-Ray and EUV Wavelengths,” Appl. Opt. 25, 2757 (1986).
[CrossRef]

Dietrich, D. D.

J. V. Bixler, T. W. Barbee, D. D. Dietrich, “Performance of Multilayer Coated Gratings in the Extreme Ultraviolet,” Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 648–654 (1989).

Epstein, G. L.

W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
[CrossRef]

Feldman, U.

W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
[CrossRef]

Gill, J. P.

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

Golub, L.

L. Golub et al., “Sub-arcsecond Observations of the Solar X-ray Corona,” Nature London 344, 842–844 (1990).
[CrossRef]

R. C. Catura, L. Golub, “XUV Multilayered Optics for Astrophysics,” Rev. Phys. Appl. 23, 1741–1746 (1988).
[CrossRef]

Gursky, H.

Haisch, B. M.

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

Hass, G.

Hettrick, M. C.

Hoover, R. B.

A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
[CrossRef]

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

Hunter, W. R.

J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
[CrossRef]

R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
[CrossRef]

J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-Coated Blazed Grating Performance in the Soft X-Ray Region,” Appl. Opt. 28, 2984–2986 (1989).
[CrossRef] [PubMed]

Joki, E. G.

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

Keski-Kuha, R. A. M.

Lindblom, J. F.

A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
[CrossRef]

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

Meekins, J. F.

Mrowka, S.

Neupert, W. M.

W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
[CrossRef]

Osantowski, J. F.

Patchett, B. E.

B. E. Patchett et al., “CDS—The Coronal Diagnostic Spectrometer,” The SOHO Mission—Scientific and Technical Aspects of the Instruments, ESA SP-1104 (1989), pp. 39–42.

Rife, J. C.

R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
[CrossRef]

J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
[CrossRef]

J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-Coated Blazed Grating Performance in the Soft X-Ray Region,” Appl. Opt. 28, 2984–2986 (1989).
[CrossRef] [PubMed]

Rottman, G. J.

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

Spiller, E.

Thomas, R. J.

W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
[CrossRef]

Toft, A. R.

Underwood, J. H.

van Patten, R. A.

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

Walker, A. B. C.

A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
[CrossRef]

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

Whittmore, T. E.

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

Appl. Opt. (7)

J. Opt. Soc. Am. (1)

Nature London (1)

L. Golub et al., “Sub-arcsecond Observations of the Solar X-ray Corona,” Nature London 344, 842–844 (1990).
[CrossRef]

Phys. Scr. (2)

J. C. Rife, T. W. Barbee, W. R. Hunter, R. G. Cruddace, “Performance of a Tungsten/Carbon Multilayer-Coated Blazed Grating from 150 to 1700 eV,” Phys. Scr. 41, 418 (1990).
[CrossRef]

R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Measurements of the Normal-Incidence X-Ray Reflectance of a Molybdenum-Silicon Multilayer Deposited on a 200 I/mm Grating,” Phys. Scr. 41, 396 (1990).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng. (3)

J. V. Bixler, T. W. Barbee, D. D. Dietrich, “Performance of Multilayer Coated Gratings in the Extreme Ultraviolet,” Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 648–654 (1989).

J. F. Lindblom, A. B. C. Walker, R. B. Hoover, T. W. Barbee, R. A. van Patten, J. P. Gill, “Soft X-Ray/Extreme Ultraviolet Images of the Solar Atmosphere with Normal Incidence Multilayer Optics,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 324 (1988).

B. M. Haisch, T. E. Whittmore, E. G. Joki, W. J. Brookover, G. J. Rottman, “A Multilayer X-Ray Mirror for Solar Photometric Imaging Flown on a Sounding Rocket,” Proc. Soc. Photo-Opt. Instrum. Eng. 982, 38–45 (1988).

Rev. Phys. Appl. (1)

R. C. Catura, L. Golub, “XUV Multilayered Optics for Astrophysics,” Rev. Phys. Appl. 23, 1741–1746 (1988).
[CrossRef]

Rev. Sci. Instrum. (1)

T. W. Barbee, “Combined Microstructure X-Ray Optics,” Rev. Sci. Instrum. 260, 1588 (1989).
[CrossRef]

Science (1)

A. B. C. Walker, T. W. Barbee, R. B. Hoover, J. F. Lindblom, “Soft X-Ray Images of the Solar Corona with a Normal Incidence Cassegrain Multilayer Telescope,” Science 241, 1781–1787 (1989).
[CrossRef]

Space Sci. Rev. (1)

W. M. Neupert, G. L. Epstein, R. J. Thomas, U. Feldman, “A Solar Ultraviolet Telescope and Spectrograph for Shuttle/Spacelab,” Space Sci. Rev. 29, 425–429 (1981).
[CrossRef]

The SOHO Mission—Scientific and Technical Aspects of the Instruments, ESA SP-1104 (1)

B. E. Patchett et al., “CDS—The Coronal Diagnostic Spectrometer,” The SOHO Mission—Scientific and Technical Aspects of the Instruments, ESA SP-1104 (1989), pp. 39–42.

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Figures (1)

Fig. 1
Fig. 1

Enhancement in first-order efficiency for the SERTS grating.

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