Abstract

Low-optical-loss glass thin films have been prepared using sputtering and electron beam deposition methods. Results of film composition and optical property measurements are presented. Glass films have been prepared with optical loss values of 0.5 dB/cm. We discuss factors limiting the reduction in optical loss for sputtered and vapor-deposited films. These films can be easily patterned using standard photolithographic processes for fabrication of integrated optics components, such as grating couplers and planar lenses.

© 1990 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Laser annealing of Corning 7059 glass waveguides

Mool C. Gupta, Thomas Strasser, and Robert Bellman
Appl. Opt. 29(15) 2307-2310 (1990)

High-contrast waveguides in sputtered pure TeO2 glass thin films

Silvia Maria Pietralunga, Marta Lanata, Massimo Ferè, Davide Piccinin, Giuseppe Cusmai, Matteo Torregiani, and Mario Martinelli
Opt. Express 16(26) 21662-21670 (2008)

Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications

Vinita Mittal, Neil P. Sessions, James S. Wilkinson, and Ganapathy Senthil Murugan
Opt. Mater. Express 7(3) 712-725 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription